In this study, a two-step composite processing technology combining the EDM process and electrochemical etching is introduced to fabricate a micro-electrodes array. Firstly, rectangular columns measuring 0.2×0.2 mm are machined by the wire-EDM (electrical discharge machining) machine tool, then electrochemical etching is used to erode the microelectrodes array into cylindrical columns. Results show that microelectrodes ranging from hundreds of micrometers to several millimeters could be prepared. Then the machined microelectrodes are used as a cathode tool for electrochemical drilling of micro-hole arrays in electrochemical micromachining (EMM). Furthermore, various parameters affecting the performance of EMM are discussed in detail. Results indicate that the production of EMM improves by using multiple microelectrodes. The pulse current shows strong localization in micro-hole drilling and improves the machining accuracy.
Datta M, Landolt D (2000) Fundamental aspects and applications of electrochemical microfabrication. Electrochim Acta 45:2535–2558CrossRefGoogle Scholar
Landolt D, Chauvy PF, Zinger O (2003) Electrochemical micromachining, polishing and surface structuring of metals: fundamental aspects and new developments. Electrochim Acta 48(20–22):3185–3201CrossRefGoogle Scholar
Lee ES, Baek SY, Cho CR (2007) A study of the characteristics for electrochemical micromachining with ultrashort voltage pulses. Int J Adv Manuf Technol 31:762–769CrossRefGoogle Scholar
Asokan P, Kumar RR, Jeyapaul R, Santhi M (2007) Development of multi-objective optimization models for electrochemical machining process. Int J Adv Manuf TechnolGoogle Scholar
Hocheng H, Kao PS, Lin SC (2005) Development of the eroded opening during electro chemical boring of hole. Int J Adv Manuf Technol 25:1105–1112CrossRefGoogle Scholar