Fabrication of multiple electrodes and their application for micro-holes array in ECM

  • M. H. WangEmail author
  • D. Zhu


In this study, a two-step composite processing technology combining the EDM process and electrochemical etching is introduced to fabricate a micro-electrodes array. Firstly, rectangular columns measuring 0.2×0.2 mm are machined by the wire-EDM (electrical discharge machining) machine tool, then electrochemical etching is used to erode the microelectrodes array into cylindrical columns. Results show that microelectrodes ranging from hundreds of micrometers to several millimeters could be prepared. Then the machined microelectrodes are used as a cathode tool for electrochemical drilling of micro-hole arrays in electrochemical micromachining (EMM). Furthermore, various parameters affecting the performance of EMM are discussed in detail. Results indicate that the production of EMM improves by using multiple microelectrodes. The pulse current shows strong localization in micro-hole drilling and improves the machining accuracy.


Composite processing technology Electrochemical etching Multiple micro-electrodes Electrochemical micromachining Micro-holes array 


Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.


  1. 1.
    Datta M, Landolt D (2000) Fundamental aspects and applications of electrochemical microfabrication. Electrochim Acta 45:2535–2558CrossRefGoogle Scholar
  2. 2.
    Landolt D, Chauvy PF, Zinger O (2003) Electrochemical micromachining, polishing and surface structuring of metals: fundamental aspects and new developments. Electrochim Acta 48(20–22):3185–3201CrossRefGoogle Scholar
  3. 3.
    Lee ES, Baek SY, Cho CR (2007) A study of the characteristics for electrochemical micromachining with ultrashort voltage pulses. Int J Adv Manuf Technol 31:762–769CrossRefGoogle Scholar
  4. 4.
    Asokan P, Kumar RR, Jeyapaul R, Santhi M (2007) Development of multi-objective optimization models for electrochemical machining process. Int J Adv Manuf TechnolGoogle Scholar
  5. 5.
    Hocheng H, Kao PS, Lin SC (2005) Development of the eroded opening during electro chemical boring of hole. Int J Adv Manuf Technol 25:1105–1112CrossRefGoogle Scholar
  6. 6.
    Schuster R, Kirchner V, Allongue P, Ertl G (2000) Electrochemical Micromachining. Science 289:98–101CrossRefGoogle Scholar
  7. 7.
    Bhattacharyya B, Mitra S, Boro AK (2002) Electrochemical machining: New possibilities for micromachining. Robot Comput-Integr Manuf 18(3–4):283–289CrossRefGoogle Scholar
  8. 8.
    Takahata K, Yogesh B (2002) Gianchandani. Batch mode micro-electro-discharge machining. J Microelectromech Syst 11:102–110CrossRefGoogle Scholar
  9. 9.
    Kim BH, Park BJ, Chu CN (2006) Fabrication of multiple electrodes by reverse EDM and their application in micro ECM. J Micromech Microeng 16(4):843–850CrossRefGoogle Scholar
  10. 10.
    Weng FT (2006) Electrodischarge machining of a coaxial array of microholes using a graphite-copper electrode. Int J Adv Manuf Technol 27:1097–1100CrossRefMathSciNetGoogle Scholar
  11. 11.
    Weng FT, Her MG (2002) Study of the batch production of micro parts using the EDM Process. Int J Adv Manuf Technol 19(4):266–270CrossRefGoogle Scholar
  12. 12.
    Weng FT (2004) Fabrication of microelectrodes for EDM machining by a combined etching process. J Micromech Microeng 14(5):N1–N4CrossRefMathSciNetGoogle Scholar
  13. 13.
    Wang ZL, Zhu BG, Cao GH (2005) Fabricating microelectrode by electrochemical micromachining. Proc SPIE 6041:1–5Google Scholar
  14. 14.
    Lim YM, Kim SH (2001) An electrochemical fabrication method for extremely thin cylindrical micropin. Int J Mach Tools Manuf 4:2287–2296CrossRefGoogle Scholar
  15. 15.
    Wang MH, Zhu D, Zhang ZY (2006) Fabrication of micro-pin based on electrochemical etching. Chin J Mech Eng 42(6):128–132CrossRefGoogle Scholar
  16. 16.
    Jain VK, Rajurkar KP (1991) An integrated approach for tool design in ECM. Prec Eng 13(2):111–124CrossRefGoogle Scholar
  17. 17.
    Rajurkar KP, Kozak J, Wei B (1993) Study of pulse electrochemical machining characteristics. Ann CIRP 42(1):231–234CrossRefGoogle Scholar

Copyright information

© Springer-Verlag London Limited 2008

Authors and Affiliations

  1. 1.College of Mechanical and Electrical EngineeringZhejiang University of TechnologyHangzhouChina
  2. 2.College of Mechanical and Electrical EngineeringNanjing University of Aeronautics and AstronauticsNanjingChina

Personalised recommendations