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Fabrication of multiple electrodes and their application for micro-holes array in ECM

  • M. H. WangEmail author
  • D. Zhu
ORIGINAL ARTICLE

Abstract

In this study, a two-step composite processing technology combining the EDM process and electrochemical etching is introduced to fabricate a micro-electrodes array. Firstly, rectangular columns measuring 0.2×0.2 mm are machined by the wire-EDM (electrical discharge machining) machine tool, then electrochemical etching is used to erode the microelectrodes array into cylindrical columns. Results show that microelectrodes ranging from hundreds of micrometers to several millimeters could be prepared. Then the machined microelectrodes are used as a cathode tool for electrochemical drilling of micro-hole arrays in electrochemical micromachining (EMM). Furthermore, various parameters affecting the performance of EMM are discussed in detail. Results indicate that the production of EMM improves by using multiple microelectrodes. The pulse current shows strong localization in micro-hole drilling and improves the machining accuracy.

Keywords

Composite processing technology Electrochemical etching Multiple micro-electrodes Electrochemical micromachining Micro-holes array 

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Copyright information

© Springer-Verlag London Limited 2008

Authors and Affiliations

  1. 1.College of Mechanical and Electrical EngineeringZhejiang University of TechnologyHangzhouChina
  2. 2.College of Mechanical and Electrical EngineeringNanjing University of Aeronautics and AstronauticsNanjingChina

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