Fabrication of diamond nanopowder using microwave plasma torch technique
This article presents a manufacturing process for diamond nanopowder by using a microwave plasma torch technique in a laboratory at near atmospheric pressure. The unique technique utilized in the arrangement is the hybrid plasma torch which was patented in 1997 by Dr. Cheng-Ming Wu in Taiwan. It has the advantage of working at near atmospheric pressure and does not require an extreme vacuum system, which is a necessary condition for fabrication of a large amount of nanoparticles. The applied constituents of gas mixtures for synthesizing diamond nanopowder in the process are CH4 with AR and CH4 with N2, where AR and N2 serve as catalysts. In processing the reaction chamber, it is first pumped to varied pressures from 40–300 Torr to induce plasma; then, the input reactive gas CH4 is fixed at a constant flow rate of 0.6 l/min and mixed up with varied input flow rate of the catalysts Ar and N2 from 0.6–1.2 l/min. The particle size of synthesized diamond nanopowder is within about 25--50 nm diameter, which mainly depends on flow rate of CH4:AR and CH4:N2.
KeywordsDiamond nanopowder Microwave plasma torch technique Near atmospheric pressure Hybrid plasma torch
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- 1.Wang ZL (2001) Characterization of nanophase materials, 1st edn. Wiley, New York Google Scholar
- 2.Feynman RP (1959) There’s plenty of room at the bottom. The annual meeting of the American Physical Society at the California Institute of Technology (Caltech)Google Scholar
- 3.Timp G (1999) Nanotechnology. Springer, Berlin Heidelberg New YorkGoogle Scholar
- 4.Zemansky MW, Dittman RH (1988) Heat and thermodynamics. McGraw-Hill, New YorkGoogle Scholar
- 8.Baba K, Hatada R (1998) Formation of diamond like carbon films by plasma source ion implantation from CH4, C2H2 and C6H6. Proceedings of the international conference on ion implantation technology, Kyoto, Japan, vol 2, pp 1214–1217Google Scholar
- 12.Wu C-M (1997) Chinese patent no. 325210, TaiwanGoogle Scholar
- 15.Ting C-C, Young T-F, Wu S-J, Huang J-S, Lin H-D (2005) An experimental study for fabrication of diamond nano powder. International conference on engineering education and research (ICEER), Tainan, Taiwan, 1–5 MarchGoogle Scholar