Fabrication of diamond nanopowder using microwave plasma torch technique

Original Article


This article presents a manufacturing process for diamond nanopowder by using a microwave plasma torch technique in a laboratory at near atmospheric pressure. The unique technique utilized in the arrangement is the hybrid plasma torch which was patented in 1997 by Dr. Cheng-Ming Wu in Taiwan. It has the advantage of working at near atmospheric pressure and does not require an extreme vacuum system, which is a necessary condition for fabrication of a large amount of nanoparticles. The applied constituents of gas mixtures for synthesizing diamond nanopowder in the process are CH4 with AR and CH4 with N2, where AR and N2 serve as catalysts. In processing the reaction chamber, it is first pumped to varied pressures from 40–300 Torr to induce plasma; then, the input reactive gas CH4 is fixed at a constant flow rate of 0.6 l/min and mixed up with varied input flow rate of the catalysts Ar and N2 from 0.6–1.2 l/min. The particle size of synthesized diamond nanopowder is within about 25--50 nm diameter, which mainly depends on flow rate of CH4:AR and CH4:N2.


Diamond nanopowder Microwave plasma torch technique Near atmospheric pressure Hybrid plasma torch 


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© Springer-Verlag London Limited 2006

Authors and Affiliations

  1. 1.Department of Mechanical EngineeringNational Taipei University of TechnologyTaipeiRepublic of China
  2. 2.Department of Mechanical and Electromechanical EngineeringNational Sun Yat-Sen UniversityKaohsiungRepublic of China
  3. 3.Department of Air-Conditioning and Refrigeration EngineeringNational Taipei University of TechnologyTaipeiRepublic of China

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