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Simultaneous optimization in ultra-precision motion systems

  • Jing Wang
  • Ming ZhangEmail author
  • Yu Zhu
  • Kaiming Yang
  • Xin Li
  • Leijie Wang
Research Paper
  • 55 Downloads

Abstract

In ultra-precision motion systems, vibration has non-negligible influence on motion performance, especially when these systems are getting more lightweight and more flexible. Research on simultaneous optimization of structural and controller design has been conducted to achieve effective vibration control. However, these methods will not have an adequate performance when used in ultra-precision motion systems with a time-varying performance location. In this paper, structural sizes, actuators configuration, and controller parameters are simultaneously optimized. To realize global vibration control and facilitate simultaneous optimization, a new vibration controller with position-dependent control gains is proposed, in which the worst-case vibration magnitude across all considered performance locations is set to be the objective function. To achieve high modeling accuracy, mass and stiffness distribution of actuators is also included into structural dynamics since it plays a large role in structural dynamics. The genetic algorithm is adopted to search for a global optimum. To increase efficiency, R-functions and level-set functions are introduced to translate the complicated over-lapping constraints into a simple integral equality. Neural fitting models instead of the finite element analysis method are used to derive eigenvalues and eigenvectors of the plant. The proposed method is verified on a simplified fine stage in the wafer stage. The numerical results prove its effectiveness.

Keywords

Simultaneous optimization Time-varying performance location Over-actuation Global vibration control 

Notes

Funding information

This work was supported in part by the National Natural Science Foundation of China under Grant 51677104 and 51475262.

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Copyright information

© Springer-Verlag GmbH Germany, part of Springer Nature 2019

Authors and Affiliations

  • Jing Wang
    • 1
  • Ming Zhang
    • 1
    Email author
  • Yu Zhu
    • 1
  • Kaiming Yang
    • 1
  • Xin Li
    • 1
  • Leijie Wang
    • 1
  1. 1.State Key Laboratory of Tribology and the Beijing Laboratory of Precision/Ultra-Precision Manufacture Equipment and Control, Department of Mechanical EngineeringTsinghua UniversityBeijingChina

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