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Keramische Zeitschrift

, Volume 69, Issue 5, pp 115–121 | Cite as

Herstellung, Eigenschaften und Anwendung nano-kristalliner Diamantschichten

  • M. Mohr
  • M. Mertens
  • K. Brühne
  • P. Gluche
  • H.-J. Fecht
Forschung & Technik

Kurzfassung

Die Möglichkeit, nanokristalline Diamantschichten mittels Heißdraht-Gasphasendeposition großflächig abzuscheiden, erlaubt es, die Anwendungspotentiale und herausragenden Eigenschaften von Diamant in größerem Umfang nutzbar zu machen. Die Korngröße der nanokristallinen Diamantschichten kann über einen weiten Bereich durch die Wahl der Wachstumsparameter variiert werden, wodurch die Materialeigenschaften für die gewünschten Anwendungen systematisch angepasst werden können. In diesem Artikel wird ein Überblick über die Herstellung, die Eigenschaften und Anwendungsmöglichkeiten von nanokristallinen Diamantschichten dargestellt.

Stichwörter

Nanokristalline Diamantschichten chemische Gasphasenabscheidung mikromechanische Bauteile Schneidwerkzeuge Sensorik 

Abstract

The possibility to deposit nanocrystalline diamond films by means of hot–filament chemical vapor deposition on large areas enables the ex–ploitation of its potential for applications and the outstanding properties of diamond to a wider extend. The grain size of nanocrystalline diamond films can be varied over a wide range by the choice of the growth param–eters. That way the material properties can be adjusted for the desired applications. In this article we give an overview over the synthesis, the properties and the potential applications of nanocrystalline diamond films.

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Copyright information

© Springer Fachmedien Wiesbaden GmbH, ein Teil von Springer Nature 2017

Authors and Affiliations

  • M. Mohr
    • 1
  • M. Mertens
    • 2
  • K. Brühne
    • 1
  • P. Gluche
    • 2
  • H.-J. Fecht
    • 1
  1. 1.Institut für Mikro und NanomaterialienUniversität UlmUlmDeutschland
  2. 2.GFDGesellschaft für Diamantprodukte mbHUlmDeutschland

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