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Nano-Micro Letters

, Volume 2, Issue 2, pp 68–73 | Cite as

The model developed for stress-induced structural phase transformations of micro-crystalline silicon films

  • Chang-Fu Han
  • Jen-Fin Lin
Open Access
Article

Abstract

The nanoindentations were applied to island-shaped regions with metal-induced Si crystallizations. The experimental stress-strain relationship is obtained from the load-depth profile in order to investigate the critical stresses arising at various phase transitions. The stress and strain values at various indentation depths are applied to determine the Gibbs free energy at various phases. The intersections of the Gibbs free energy lines are used to determine the possible paths of phase transitions arising at various indentation depths. All the critical contact stresses corresponding to the various phase transitions at four annealing temperatures were found to be consistent with the experimental results.

Keywords

Silicon films Phase transitions Stress-strain model 

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Copyright information

© Shanghai Jiao Tong University (SJTU) Press 2010

Authors and Affiliations

  1. 1.Department of Mechanical EngineeringTaiwan, R.O.C.
  2. 2.Center for Micro/Nano Science and Technology National Cheng Kung UniversityTainanTaiwan, R.O.C.

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