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Process control for heterogeneous materials systems: A universal challenge

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Kimerling, L.C. Process control for heterogeneous materials systems: A universal challenge. JOM 41, 8 (1989). https://doi.org/10.1007/BF03220190

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Keywords

  • Compound Semiconductor
  • Gallium Arsenide
  • Lattice Misfit
  • Indium Phosphide
  • Silica Optical Fiber