Though compound semiconductor manufacturing technologies are very much similar to those of the silicon series memory devices, the production process control technologies tend to rely on the experiences of operators and managers because the production technology suitable for the characteristics of compound semiconductor fabrication has not yet been sufficiently developed, compared with that of silicon semiconductors. In addition, the semiconductor industry is being converted into mass customization production and an open foundry service for cooperation between businesses. In this study, a process data acquisition system suitable for compound semiconductors which collects data by operator input and equipment information extraction by using GEM was developed. The developed system was implemented in a real production system and compared with the conventional job card method. Through the application of the developed system, a foundation for constructing a real-time based MES (Manufacturing Execution System) was developed, with such expected effects as process information monitoring, meeting delivery schedule, and reducing lead-time.
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W. J. Roesch, Historical review of compound semiconductor reliability,Microelectronics and Reliability. 46 (8) (2006) 1218–1227.
C. C. Chen, C. S. Wu and C. F. Rebecca, e-Service enhancement priority matrix: The case of an IC foundry company.Information & Management. 43 (5) (2006) 572–586.
P. Seden, A respecification and extension of the DeLone and McLean model of IS success,Information System Research. 8 (34) (1997) 240–253.
Rerick A. Raymond, Fab 6 pipeline constraint management implementation at Harris semiconductor corp,Microelectronics Journal. 28 (2) (1993) viii-ix.
T. J. Chua, M. W. Liu, F. Y. Wang, W. J. Yan and T. X. Cai, An intelligent multi-constraint finite capacity-based lot release system for semiconductor backend assembly environment,Robotics and Computer-Integrated Manufacturing. 23 (3) (2007) 326–338.
R. Sandell and K. Srinivasan, Evaluation of lot release policies for semiconductor manufacturing system, Proceedings of the 1996 winter simulation conference (1996) 1014–1022.
W. E. Skeith, An investigation of production control using work-in-process as a control variable, Dept. of Industrial Engineering, Texas A&M University, USA.
Ruey-Shun Chen, Yung-Shun Tsai and Chan-Chine Chang, Design and implementation of an intelligent manufacturing execution system for semiconductor manufacturing industry,IEEE ISIE 2006 (2006) 2948–2953.
F. T. Cheng, E. Shen, J. Y. Deng and K. Nguyen, Development of a system framework for the computer-integrated manufacturing execution system: a distributed object-oriented approach,International Journal of Computer Integrated Manufacturing. 12 (5) (1999) 384–402.
S. W. Lee, P. H. Koo, B. N. Kim and H. K. Lee, A process management system for order-driven machining systems,Journal of Korean Society of Maintenance Engineers. 6 (1) (2001) 291–302.
Y. C. Hsieh, N. P. Lin and H. C. Chiu, Virtual factory and relationship marketing — a case study of a Taiwan semiconductor manufacturing company,International Journal of Information Management. 22 (2) (2002) 109–126.
C. Barratt and M. Fresina, Factory Automation,International Conference on Compound Semiconductor Manufacturing Technology (GaAs Manufacturing Workshop) (2001).
S. W. Lee, J. H. Park and H. K. Lee, A design of integrated manufacturing system for compound semiconductor,Journal of Society Korea Industrial and Systems Engineering. 26 (3) (2003) 67–73.
H. J. Yoon, Agent-based scheduling for semiconductor wafer fabrication facilities,Transactions of the Korean Society of Mechanical Engineers A. 29 (11) (2005) 1463–1471.
S. K. Kim, and Y. T. Kim, Production data management technique for automatic production line,Transactions of the Korean Society of Mechanical Engineers. 35 (4) (1995) 285–293.
Silicon Tech. R&D Center,GEM Online Spec Manual, Silicon Tech. Ltd. (2001).
H. J. Yoon and D. Y. Lee, On-line scheduling method for track systems in semiconductor fabrication,Transactions of the Korean Society of Mechanical Engineers A. 25 (3) (2001) 443–451.
MESA International, The benefits of MES: a report form the field,MESA International White Paper No. 1 (1994).
S. W. Lee, P. H. Koo and H. K. Lee, Development of processing information system for MOD environment,Proceeding of Industrial Engineering. 1 (1999) 424–425.
B. Enteshami, R. G. Petrakian and P. M. Shabe, Trade-offs in cycle time management: hot lots,IEEE Transactions on Semiconductor Manufacturing. 5 (2) (1982) 101–106.
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Lee, S.W., Lee, H.K. Data acquisition system of compound semiconductor fabrication. J Mech Sci Technol 21, 2149–2158 (2007). https://doi.org/10.1007/BF03177475
- Data acquisition system
- Foundry service
- Mass customization
- Compound semiconductor