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Data acquisition system of compound semiconductor fabrication

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Abstract

Though compound semiconductor manufacturing technologies are very much similar to those of the silicon series memory devices, the production process control technologies tend to rely on the experiences of operators and managers because the production technology suitable for the characteristics of compound semiconductor fabrication has not yet been sufficiently developed, compared with that of silicon semiconductors. In addition, the semiconductor industry is being converted into mass customization production and an open foundry service for cooperation between businesses. In this study, a process data acquisition system suitable for compound semiconductors which collects data by operator input and equipment information extraction by using GEM was developed. The developed system was implemented in a real production system and compared with the conventional job card method. Through the application of the developed system, a foundation for constructing a real-time based MES (Manufacturing Execution System) was developed, with such expected effects as process information monitoring, meeting delivery schedule, and reducing lead-time.

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Correspondence to Seung Woo Lee.

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Lee, S.W., Lee, H.K. Data acquisition system of compound semiconductor fabrication. J Mech Sci Technol 21, 2149–2158 (2007). https://doi.org/10.1007/BF03177475

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Keywords

  • Data acquisition system
  • Foundry service
  • Mass customization
  • MES
  • Compound semiconductor