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Science in China Series A: Mathematics

, Volume 43, Issue 4, pp 414–420 | Cite as

Raman scattering of nanocrystalline silicon embedded in SiO2

  • Zhixun MaEmail author
  • Xianbo Liao
  • Guanglin Kong
  • Junhao Chu
Article

Abstract

Raman scattering of nanocrystalline silicon embedded in SiO2 matrix is systematically investigated. It is found that the Raman spectra can be well fitted by 5 Lorentzian lines in the Raman shift range of 100–600 cm−1. The two-phonon scattering is also observed in the range of 600–1100 cm−1. The experimental results indicate that the silicon crystallites in the films consist of nanocrystalline phase and amorphous phase; both can contribute to the Raman scattering. Besides the red-shift of the first order optical phonon modes with the decreasing size of silicon nanocrystallites, we have also found an enhancement effect on the second order Raman scattering, and the size effect on their Raman shift

Keywords

nanocrystalline silicon phonon confinement effect Raman scattering 

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Copyright information

© Science in China Press 2000

Authors and Affiliations

  • Zhixun Ma
    • 1
    • 2
    Email author
  • Xianbo Liao
    • 1
  • Guanglin Kong
    • 1
  • Junhao Chu
    • 1
  1. 1.State Key Laboratory for Surface Physics, Institute of Semiconductors, Center for Condensed Matter PhysicsChinese Academy of SciencesBeijingChina
  2. 2.National Laboratoty for Infrared Physics, Shanghai Institute of Technical PhysicsChinese Academy of SciencesShanghaiChina

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