Detection of coaxial backscattered electrons in SEM

  • Jiang Chang-zhong
  • Ren Da-zhi
Article
Received:

Abstract

We present a coaxial detection of the backscattered electrons in SEM. The lens-aperture has been used to filter in energy and focus the backscattered electrons. This particular geometry allows us to eliminate the low energy backscattered electrons and collect the backscattered electrons, which are backscattered close to the incident beam orientation. The main advantage of this geometry is adapted to topographic contrast attenuation and atomic number contrast enhancement. Thus this new SEM is very suitable to analyze the material composition.

Key words

scanning electron microscopy backscattered electrons coaxial detection 

CLC number

TN 16 
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Copyright information

© Springer 2000

Authors and Affiliations

  • Jiang Chang-zhong
    • 1
  • Ren Da-zhi
    • 1
  1. 1.Department of PhysicsWuhan UniversityWuhanChina

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