Chemical vapor deposition of refractory metals from fluoride gases
The kinetics of the chemical vapor deposition of Group V (V, Nb, Ta), VI (Mo, W), and VII (Re) transition metals from fluoride-hydrogen mixtures were studied. The major steps of the deposition process were established. The deposition rate is shown to correlate with the thermodynamic probability of hydrogen reduction. The effect of intermediate products on the deposition rate of 3d and 4d transition metals is assessed.
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- 1.Syrkin, V.G.,Karbonil’nye metally (Carbonyl Metals), Moscow: Metallurgiya, 1978.Google Scholar
- 2.Evstyukhin, A.I., Yanchur, V.P., Smirnov, V.P., and Shulov, VA., Preparation of Tungsten Coatings by Chemical Transport of Tungsten Bromides, inMaterialy dlya atomnoi tekhniki (Nuclear Materials), Moscow: Energoatomizdat, 1983, pp. 3–10.Google Scholar
- 3.Ivanov, V.E., Nechiporenko, E.P., Krivoruchko, V.M., and Sagalovich, V.V.,Kristallizatsiya tugoplavkikh metallov iz gazovoi fazy (Vapor Deposition of Refractory Metals), Moscow: Atomizdat, 1974.Google Scholar
- 5.Korolev, Yu.M., Solov’ev, V.F., Stolyarov, V.I.,et al., Properties of Tungsten Deposited by the Fluoride Process, inMetallurgiya i metallovedenie chistykh metallov (Metallurgy and Physical Chemistry of Pure Metals), Moscow: Atomizdat, 1975, issue 11, pp. 15–23.Google Scholar
- 7.Lakhotkin, Yu.V. and Krasovskii, A.I., Deposition of W-Re Alloys from Hexafluoride-Hydrogen Mixtures,Izv. Akad. Nauk SSSR, Met., 1982, no. 3, pp. 27–31.Google Scholar
- 9.Korolev, Yu.M. and Rychagov, A.V., Hydrogen Reduction of Molybdenum Hexafluoride on Tubular Surfaces,Izv. Akad. Nauk SSSR, Met., 1978, no. 5, pp. 40–46.Google Scholar
- 10.Korolev, Yu.M. and Rychagov, A.V., On the Mechanism of Heterogeneous Hydrogen Reduction of Molybdenum Hexafluoride,Izv. Akad. Nauk SSSR, Met., 1978, no. 6, pp. 16–22.Google Scholar
- 11.Pobedash, N.V., Korolev, Yu.M., Rychagov, A.V.,et al., Preparation of Niobium and Tantalum by Hydrogen Reduction of Pentafiuorides,Metallurgiya i metallovedenie chistykh metallov (Metallurgy and Physical Chemistry of Pure Metals), Moscow: Atomizdat, 1975, issue 11, pp. 23–28.Google Scholar
- 12.Rakov, E.G., Mikulenok, V.V., Sudarikov, B.N., and Opalovskii, A.A., Preparation of Niobium and Tantalum Metals by Reduction of Pentafluorides,Tr. Inst.-Mosk. Khim.-Tekhnol. Inst. im. D. I. Mendeleeva, 1977, no. 97, pp. 81–85.Google Scholar
- 13.Rychagov, A.V., Korolev, Yu.M., and Pobedash, N.V., Kinetics of Reaction between Niobium and Niobium Pentafluoride Vapor,Zh. Neorg. Khim., 1978, vol. 23, no. 7, pp. 1967–1970.Google Scholar
- 14.Rakov, E.G., Mikulenok, V.V., Pevtsov, S.V., and Sudarikov, B.N., Reaction of Niobium with Hydrogen Fluoride,Tr. Inst.-Mosk. Khim.-Tekhnol. Inst. im. D. I. Mendeleeva, 1977, no. 97, pp. 57–67.Google Scholar
- 15.Malandin, M.B., Lakhotkin, Yu.V., and Kuz’min, V.P.,Osobennosti termodinamiki i kinetiki ftoridnogo protsessa osazhdeniya splavov d-perekhodnykh metallov s vol’framom (Thermodynamics and Kinetics of the Fluoride Vapor Deposition of d-Metal-Tungsten Alloys), Moscow, 1990.Google Scholar