Degenerate cadmium oxide films for electronic devices
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Highly conducting and transparent cadmium oxide films have been deposited on Corning 7059 glass substrates by ion-beam sputtering and by spray pyrolysis. The electrical and optical properties of CdO films prepared by the two techniques are similar. Typical films of 0.5 μm thickness have electrical resistivities of (2–5) × 10-3 ohm-cm, carrier concentrations of approximately 1020 cm-3, and an optical transmission of higher than 70% in the wavelength range of 600–900 nm. An optical bandgap of 2.4–2.42 eV was deduced from the optical transmission data.
Key wordsCadmium oxide semiconductor film optical transmission electrical resistivity ion beam sputtering spray pyrolysis
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