Nanoindentation of thin-film-substrate system: Determination of film hardness and Young's modulus
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In the present paper, the hardness and Young's modulus of film-substrate systems are determined by means of nanoindentation experiments and modified models. Aluminum film and two kinds of substrates, i.e. glass and silicon, are studied. Nanoindentation XP II and continuous stiffness mode are used during the experiments. In order to avoid the influence of the Oliver and Pharr method used in the experiments, the experiment data are analyzed with the constant Young's modulus assumption and the equal hardness assumption. The volume fraction model (CZ model) proposed by Fabes et al. (1992) is used and modified to analyze the measured hardness. The method proposed by Doerner and Nix (DN formula) (1986) is modified to analyze the measured Young's modulus. Two kinds of modified empirical formula are used to predict the present experiment results and those in the literature, which include the results of two kinds of systems, i.e., a soft film on a hard substrate and a hard film on a soft substrate. In the modified CZ model, the indentation influence angle, φ, is considered as a relevant physical parameter, which embodies the effects of the indenter tip radius, pile-up or sink-in phenomena and deformation of film and substrate.
Key Wordsnanoindentation hardness Young's modulus film-substrate system
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- 4.Laursen TA, Simo JC. A study of the mechanics of microindentation using finite elements.J Mater Res, 1992, 7: 618–626Google Scholar
- 7.Fabes BD, Oliver WC, McKee RA, et al. The determination of hardness from the composite response of film and substrate to nanometer scale indentation.J Mater Res, 1992, 7: 3056–3064Google Scholar
- 8.Chechenin N, Bottiger GJ, Krog JP. Nanoindentation of amorphous aluminum oxide films II. Critical parameters for the breakthrough and a membrane effect in thin hard films on soft substrates.Thin Solid Films, 1995, 261: 227–235Google Scholar
- 10.Doerner MF, Nix WD. A method for interpreting the data from depth-sensing indentation instruments,J Mater Res, 1986, 1: 601–609Google Scholar
- 12.Schweitz JA. Mechanical characterization of thin films by micromechanical techniques.MRS Bulletin, 1992, 17: 33–45Google Scholar
- 13.Pharr GM, Oliver WC. Measurement of thin film mechanical properties using nanoindentation.MRS Bulletin, 1992, 17: 28–33Google Scholar
- 14.Field JS, Swain MV. A simple predictive model for spherical indentation.J Mater Res, 1993, 8: 297–306Google Scholar
- 15.Oliver WC, Pharr GM. An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experiment.J Mater Res, 1992, 7: 1564–1583Google Scholar
- 16.Joslin DL, Oliver WC. A new method for analyzing data from continuous depth-sensing microindentation test.J Mater Res, 1990, 5: 123–126Google Scholar