Il Nuovo Cimento D

, Volume 16, Issue 1, pp 75–88 | Cite as

Contributions of different generations of recoils to sputtering by backscattered light ions

  • D. Aiello
  • V. V. Pletnev
  • G. Falcone
  • L. Forlano
Article
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Accepted:

Summary

Neumann's expansion of the integral form of the Boltzmann transport equation is used to estimate the contribution of different generations of recoils to sputtering. By considering the flux generated by backscattered ions it is shown that primary recoils are, in the region of low energy (few keV), the main contribution to sputtering.

PACS 79.20

Impact phenomena (including electron spectra and sputtering) 
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Copyright information

© Società Italiana di Fisica 1994

Authors and Affiliations

  • D. Aiello
    • 1
    • 2
  • V. V. Pletnev
    • 1
    • 2
  • G. Falcone
    • 1
    • 2
  • L. Forlano
    • 1
    • 2
  1. 1.Dipartimento di FisicaUniversità della CalabriaRende (CS)Italia
  2. 2.Unità INFMCosenzaItalia

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