Journal of Sol-Gel Science and Technology

, Volume 8, Issue 1, pp 999–1005

Planar ZrO2 waveguides prepared by the sol-gel process: Structural and optical properties

  • C. Urlacher
  • J. Dumas
  • J. Serughetti
  • J. Mugnier
  • M. Munoz
Article

DOI: 10.1007/BF02436974

Cite this article as:
Urlacher, C., Dumas, J., Serughetti, J. et al. J Sol-Gel Sci Technol (1997) 8: 999. doi:10.1007/BF02436974

Abstract

ZrO2 waveguides are prepared by the sol-gel process from a solution containing zirconiumn-propoxide and acetylacetone in propanol-2. Structural characterizations are investigated for different annealing temperatures using suitable techniques including Waveguide Raman Spectroscopy, Electron Microscopy and Atomic Force Microscopy. Films are amorphous at 300°C and the pure ZrO2 tetragonal crystalline phase appears beyond 400°C. Crystallized films present a dense, uniform and polycrystalline structure made up by randomly oriented nanocrystallites, the diameter of which increases from 38 Å at 400°C to 53 Å at 600°C. Waveguides are at least monomode TE0 at 632.8 nm. At this wavelength, optical losses are about, 0.8±0.2dB/cm for amorphous layers and increase up to 2.5±0.4 dB/cm for 600°C heat-treated waveguides.

Keywords

ZrO2 sol-gel planar waveguide Raman scattering 

Copyright information

© Kluwer Academic Publishers 1997

Authors and Affiliations

  • C. Urlacher
    • 1
  • J. Dumas
    • 1
  • J. Serughetti
    • 1
  • J. Mugnier
    • 2
  • M. Munoz
    • 3
  1. 1.Département de Physique des Matériaux (URA 172)Université Claude Bernard, Lyon IVilleurbanne CedexFrance
  2. 2.Laboratoire de Physico-Chimie des Matériaux Luminescents (URA 442)Université Claude Bernard, Lyon IVilleurbanne CedexFrance
  3. 3.IBCP-CNRS (UPR 412)LyonFrance

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