Determination of Mg, Ti, Ni and Zn in semiconductor silicon by deuteron activation analysis

  • M. L. Boettger
  • D. Birnstein
  • S. Niese
Article
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Abstract

Mg, Ti, Ni and Zn have been determined in semiconductor silicon by deuteron activation analysis using radiochemical separation and coincidence spectrometric methods. Detection limits under the experimental conditions are 15, 3, 0.7, and 14 ppb, respectively.

Keywords

Silicon Physical Chemistry Inorganic Chemistry Detection Limit Activation Analysis 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.
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Copyright information

© Akadémiai Kiadó 1988

Authors and Affiliations

  • M. L. Boettger
    • 1
  • D. Birnstein
    • 1
  • S. Niese
    • 1
  1. 1.Central Institute of NuclearAcademy of Sciences of the G. D. R.Dresden(GDR)

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