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The application of a new "3S" method to sputtering velocity and yield measurements

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References

  1. 1.

    O. AUCIELLO, in “Ion Bombardment Modification of Surfaces: Fundamentals and Applications”, edited by O. Auciello and R. Kelly (Elsevier Science Publishers B.V., Amsterdam, 1984) p. 435.

  2. 2.

    Z. W. KOWALSKI,J. Mater. Sci. Lett. 6 (1987) 69.

  3. 3.

    Z. W. KOWALSKI and D. JERMAESKI,ibid. to be published.

  4. 4.

    Z. W. KOWALSKI, S. ŁASISZ and S. SMARDZ,ibid. to be published.

  5. 5.

    D. J. BARBER, F. C. FRANK, M. MOSS, J. W. STEEDS and I. S. T. TSONG,J. Mater. Sci. 8 (1973) 1030.

  6. 6.

    H. BACH,J. Non-Cryst. Solids 3 (1980) 1.

  7. 7.

    Z. W. KOWALSI,J. Mater. Sci. 16 (1981) 3512.

  8. 8.

    Idem, J. Mater. Sci. Lett. 5 (1986) 1061.

  9. 9.

    Idem, Rep. IET Technical University of Wrocław,15 (1986) 1.

  10. 10.

    Idem, J. Mater. Sci. 20 (1985) 1521.

  11. 11.

    VEECO Catalogue, 1979, p. T22.

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Kowalski, Z.W. The application of a new "3S" method to sputtering velocity and yield measurements. J Mater Sci Lett 6, 1207–1208 (1987). https://doi.org/10.1007/BF01729185

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Keywords

  • Polymer
  • Yield Measurement