Czechoslovak Journal of Physics B

, Volume 24, Issue 5, pp 589–592 | Cite as

Remarks on the preparation of amorphous silicon films by gas reaction

  • M. Ružička
Letters to the Editor
  • 22 Downloads

Keywords

Silicon Amorphous Silicon Silicon Film Amorphous Silicon Film 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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References

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Copyright information

© Academia, Publishing House of the Czechoslovak Academy of Sciences 1974

Authors and Affiliations

  • M. Ružička
    • 1
  1. 1.Department of Experimental PhysicsFaculty of Science UJEPBrnoCzechoslovakia

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