Plasma and beam facility atomic oxygen erosion of a transition metal complex Article Received: 14 March 1995 Revised: 11 September 1995 DOI:
Cite this article as: Illingsworth, M.L., Banks, B.A., Smith, J.W. et al. Plasma Chem Plasma Process (1996) 16: 209. doi:10.1007/BF01570179 Abstract
Glassy residues of the complex bis(N,N′-disalicylidene-1,2-phenylenediamino)zirconium(IV), Zr(dsp)
2, on glass slides were exposed to atomic oxygen in a plasma asher or an atomic beam facility for various amounts of lime in order to study the erosion process, determine the rate of erosion, and learn the chemical identity of the residue. The exposed films were characterized by weight loss, optical photography, profilometry, diffuse reflectance and total transmittance spectroscopy, scanning electron microscopy (SEM) with wavelength dispersive X-ray spectrometry (WDS), X-ray diffraction, and X-ray photoelectron spectroscopy (XPS). Results indicate that these films erode much more slowly polyimide (Kapton™) film under identical conditions, that the erosion is very nonuniform, and that zirconium dioxide is the predominant product after extended exposure. This complex is currently being evaluated as a polymer additive. Key words Atomic oxygen erosion plasma atomic beam facility zirconium complex weight loss optical photography profilometry diffuse reflectance spectroscopy total transmittance spectroscopy scanning electron microscopy wavelength dispersive X-ray spectroscopy X-ray diffraction X-ray photoelectron spectroscopy References
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