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Applied Physics A

, Volume 62, Issue 5, pp 397–401 | Cite as

The role of excited species in ultraviolet-laser materials ablation III. Non-stationary ablation of organic polymers

  • B. Luk'yanchuk
  • N. Bityurin
  • N. Arnold
  • D. Bäuerle
Article

Abstract

The role of non-stationary effects in nano-second ultraviolet (UV) excimer-laser ablation of organic polymers is discussed. The model includes reversible changes in absorption related to darkening and bleaching effects. Comparison of calculations and experimental data for polyimide demonstrates that the photophysical model describes the ablation kinetics quite well.

PACS

82.65 82.50 42.10 

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References

  1. 1.
    R. Srinivasan: InLaser Ablation. Principles and Applications, ed. by J.C. Miller, Springer Ser. Mater. Sci. Vol. 28 (Springer, Berlin, Heidelberg 1994) p. 107Google Scholar
  2. 2.
    S. Lazare, V. Granier: Laser Chem.10, 25 (1989)Google Scholar
  3. 3.
    D.P. Brunco, M.Q. Thompson, C.E. Otis, P.M. Goodwin: J. Appl. Phys.72, 434 (1992)Google Scholar
  4. 4.
    S. Küper, J. Brannon, K. Brannon: Appl. Phys. A56, 43 (1993)Google Scholar
  5. 5.
    B. Luk'yanchuk, N. Bityurin, S. Anisimov, D. Bäuerle: Appl. Phys. A57, 367 (1993);Int'l Conf. ALT'92, Moscow (1992)Google Scholar
  6. 6.
    B. Luk'yanchuk, N. Bityurin, S. Anisimov, D. Bäuerle: Appl. Phys. A57, 449 (1993)Google Scholar
  7. 7.
    J. Guillet:Polymers — Photophysics and Photochemistry. An Introduction to the Study of Photoprocesses in Macromolecules (Cambridge Univ. Press, Cambridge 1985)Google Scholar
  8. 8.
    D. Bäuerle, B. Luk'yanchuk, P. Schwab, X.Z. Wang, E. Arenholz: InLaser Ablation of Electronic Materials, ed. by E. Fogarassy, S. Lazare (North-Holland, Amsterdam 1992) p. 39Google Scholar
  9. 9.
    S.R. Cain, F.C. Burns, C.E. Otis, B. Braren: J. Appl. Phys.72, 5172 (1993)Google Scholar
  10. 10.
    G. Arjavalingam, G. Hougham, J.P. LaFemina: Polymer31, 840 (1990)Google Scholar
  11. 11.
    J.P. LaFemina, G. Arjavalingam, G. Hougham: J. Chem. Phys.90, 5154 (1989)Google Scholar
  12. 12.
    V.G. Plotnikov: Dokl. Akad. Nauk SSSR301, 376 (1988)Google Scholar
  13. 13.
    B. Luk'yanchuk. N. Bityurin, S. Anisimov, D. Bäuerle: InExcimer Lasers, ed. by L.D. Laude, NATO ASI Series E256, 59 (Kluwer, Dordrecht, 1994)Google Scholar
  14. 14.
    R. Sauerbrey, G.H. Pettit: Appl. Phys. Lett.55, 421 (1989)Google Scholar
  15. 15.
    G.H. Pettit, R. Sauerbrey: Appl. Phys. Lett.58, 793 (1991)Google Scholar
  16. 16.
    G.H. Pettit, R. Sauerbrey: Appl. Phys. A56, 51 (1993)Google Scholar
  17. 17.
    J.H. Brannon, J.R. Lankard, A.I. Baise, F. Burns, J. Kaufman: J. Appl. Phys.58, 2036 (1985)Google Scholar
  18. 18.
    J.K. Frisch, Y. Hefetz, T.F. Deutsch: Appl. Phys. B52, 168 (1991)Google Scholar
  19. 19.
    H. Fukumura, H. Masuhava: Chem. Phys. Lett.221, 373 (1994)Google Scholar
  20. 20.
    S.I. Anisimov: High Temp.6, 110 (1968)Google Scholar
  21. 21.
    O.C. Zienkiewicz:The Finite Element Method (McGraw-Hill, New York 1977)Google Scholar

Copyright information

© Springer-Verlag 1996

Authors and Affiliations

  • B. Luk'yanchuk
    • 1
  • N. Bityurin
    • 1
  • N. Arnold
    • 1
  • D. Bäuerle
    • 1
  1. 1.Angewandte PhysikJohannes-Kepler-Universität LinzLinzAustria

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