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Applied Physics A

, Volume 60, Issue 2, pp 227–231 | Cite as

Investigation of a new method to control thin-film growth

  • Z. Mitura
  • P. Marzurek
  • K. Paprocki
  • P. Mikolajczak
Article

Abstract

Results of investigations of a possible application of RHEED azimuthal plots of characterize in situ epitaxially grown thin films are described. Dynamically calculated and measured azimuthal plots for Si(111) are compared. A set of azimuthal plots experimentally collected at different stages of preparation of a Si/YSi2-x/Si(111)-7×7 layered structure are presented.

PACS

61.14.Hg 68.35.Bs 68.55.Jk 

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Copyright information

© Springer-Verlag 1995

Authors and Affiliations

  • Z. Mitura
    • 1
  • P. Marzurek
    • 1
  • K. Paprocki
    • 1
  • P. Mikolajczak
    • 1
  1. 1.Department of Experimental Physics, Institute of PhysicsMarie-Curie Sklodowska UniversityLublinPoland

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