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Microchimica Acta

, Volume 114, Issue 1, pp 363–376 | Cite as

An accurate computer correction program for quantitative electron probe microanalysis

  • Claude Merlet
Contributed Papers

Abstract

The aim of this paper is to present a practical and accurate program of correction based on a new mathematical description of φ(ϱz), which allows a global correction combining atomic number and absorption correction [ZA]. Characteristic and continuum fluorescence corrections are also included to complete the program. Elements of atomic number in the range 4 <Z < 92 and X-ray emission linesKα,Kβ,Lα,Lβ,Mα andMβ are taken into account by the program which is especially designed for difficult cases (light elements, low overvoltages, low accelerating voltages).

This correction program written in Fortran is designed to work off line under DOS or WINDOWS graphic operating systems on PC compatible microcomputers. The WINDOWS user interface environment makes the software easy to use. The computation and plot of φ(ϱz) depth distribution function as well as the printing of physical parameters enable the user to easily optimize the experimental conditions.

This procedure has been tested on various databases (Pouchou and Pichoir, Love et al. and Bastin et al.) for medium to heavy elements. For the light elements (O, C andB) Bastin's database has been used. The results presented furthermore reveal the good accuracy of the method and allow a comparison with other correction procedures.

Key words

EPMA computer program correction procedure X-ray depth distribution 

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Copyright information

© Springer-Verlag 1994

Authors and Affiliations

  • Claude Merlet
    • 1
  1. 1.Sciences et Techniques du Languedoc, Pl. E. BataillonC.G.G, CNRS, Université de Montpellier IIMontpellier Cedex 5France

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