Journal of Materials Science

, Volume 17, Issue 11, pp 3106–3112 | Cite as

Growth of diamond particles from methane-hydrogen gas

  • Seiichiro Matsumoto
  • Yoichiro Sato
  • Masayuki Tsutsumi
  • Nobuo Setaka
Papers

Abstract

Microcrystals of diamond were grown on non-diamond substrates including silicon, molybdenum and silica, as well as on diamond by chemical vapour deposition. Deposition was carried out by passing a mixture of hydrocarbon and hydrogen gases through a heated reaction chamber in which a hot tungsten filament was held near the substrates. The deposit was identified by reflection electron diffraction and Raman spectroscopy. The effects of experimental conditions on the growth features were studied.

Keywords

Hydrocarbon Tungsten Molybdenum Raman Spectroscopy Chemical Vapour Deposition 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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References

  1. 1.
    W. G. Eversole, US Pat. 3030187 and 3030188 (1958).Google Scholar
  2. 2.
    J. C. Angus, H. A. Will andW. S. Stanko,J. Appl. Phys. 39 (1968) 2915.Google Scholar
  3. 3.
    S. Aisenberg andR. Chabot,ibid. 42 (1971) 2953.Google Scholar
  4. 4.
    E. G. Spencer, H. P. Schmidt, D. C. Joy andF. J. Sansalone,Appl. Phys. Lett. 29 (1976) 118.Google Scholar
  5. 5.
    G. Gautherin andChr. Weismental,Thin Solid Films 50 (1978) 135.Google Scholar
  6. 6.
    D. S. Whitmell andR. W. Williamson,ibid. 35 (1976) 255.Google Scholar
  7. 7.
    L. Holland andS. M. Ojha,ibid. 38 (1976) L17.Google Scholar
  8. 8.
    D. A. Anderson,Phil. Mag. 35 (1977) 17.Google Scholar
  9. 9.
    S. Berg andL. P. Andersson,Thin Solid Films 58 (1979) 117.Google Scholar
  10. 10.
    B. V. Deryagin, B. V. Spitsyn, L. L. Builov, A. A. Klochkov, A. E. Gorodetskii andA. V. Smol'Yaninov,Sov. Phys. Dokl. 21 (1976) 676.Google Scholar
  11. 11.
    B. V. Spitsyn, L. L. Bouilov andB. V. Derjaguin,J. Crystal Growth 52 (1981) 219.Google Scholar
  12. 12.
    ASTM X-ray powder data file 6-675.Google Scholar
  13. 13.
    A. Solin andA. K. Ramdas,Phys. Rev. B1 (1970) 1687.Google Scholar
  14. 14.
    “JANAF Thermodynamical Tables” (NBS, Washington, 1971).Google Scholar
  15. 15.
    S. Matsumoto andN. Setaka,Carbon 17 (1979) 485.Google Scholar
  16. 16.
    S. Matsumoto, Y. Sato andN. Setaka,ibid. 19 (1981) 231.Google Scholar
  17. 17.
    B. Lersmacher, H. Lydtin, W. F. Knippenberg andA. W. Moore,ibid. 5 (1967) 205.Google Scholar

Copyright information

© Chapman and Hall Ltd. 1982

Authors and Affiliations

  • Seiichiro Matsumoto
    • 1
  • Yoichiro Sato
    • 1
  • Masayuki Tsutsumi
    • 1
  • Nobuo Setaka
    • 1
  1. 1.National Institute for Research in Inorganic MaterialsIbaraki-kenJapan

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