Microchimica Acta

, Volume 91, Issue 1–6, pp 365–369 | Cite as

XPS and SIMS investigations on plasma-treated glass surfaces

  • J. Bartella
  • H. Grünwald
  • U. Herwig
Article
Received:

Abstract

Commercially available float-glass samples were exposed to ion bombardment in an HF-plasma. This should form an SiO2-rich layer close to the surface of the samples. From XPS-investigations it was found that treatment times between 2 and 4 min in Ar plasma lead to a pronounced depletion of alkalis. Further FAB-SIMS depth profiles gave additional information about the extension of the layers with altered stoichiometry.

Key words

plasma treatment glass surface XPS-analysis 
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References

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    R. H. Doremus,Glass Science, Wiley, New York, 1973.Google Scholar
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    D. J. Newman, M. J. Aggleton,Physics in Technology 1977, 10.Google Scholar
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    N. H. Ray, M. H. Stacey,J. Mat. Sci. 1969,4, 73.Google Scholar

Copyright information

© Springer-Verlag 1987

Authors and Affiliations

  • J. Bartella
    • 1
  • H. Grünwald
    • 1
  • U. Herwig
    • 1
  1. 1.Leybold AGHanau 1Federal Republic of Germany

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