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Silicon nitride crystal structure and observations of lattice defects

Abstract

In view of the considerable progress that has been made over the last 40 years on the microstructural design of silicon nitride and related materials of tailored properties for specific applications, a clear review of the current understanding of the crystal structure and crystal chemistry of silicon nitride is timely. The crystal structures, crystal chemistry, and lattice defect nature of silicon nitride are critically reviewed and discussed, with emphasis placed firstly on the structural nature of α-silicon nitride (whether it is a pure silicon nitride, or should better be regarded as an oxynitride); and secondly on the space group of β-silicon nitride (whether it is P63/m or P63). In conjunction with recent observations of vacancy clusters in α-silicon nitride, a comprehensive view compatible with all the experimental facts with respect to the structural nature of α-silicon nitride is tentatively presented.

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References

  1. 1.

    J. F. Collins andR. W. Gerby,Metals 7 (1955) 612.

  2. 2.

    K. H. Jack,Mater. Res. Soc. Symp. Proc. 287 (1993) 15.

  3. 3.

    A. M. Sage andJ. H. Histed,Powder Metall. 4 (1961) 196.

  4. 4.

    B. Vassiliou andF. G. Wilde,Nature 179 (1957) 435.

  5. 5.

    P. Popper andS. N. Ruddlesden,ibid. 179 (1957) 1129.

  6. 6.

    D. Hardie andK. H. Jack,ibid. 180 (1957) 332.

  7. 7.

    S. N. Ruddlesden andP. Popper,Acta Crystallogr. 11 (1958) 465.

  8. 8.

    P. Grieveson, K. H. Jack andS. Wilde, “Special Ceramics”, edited by P. Popper,4 (George Faulkner Press, Manchester, 1968) p. 237.

  9. 9.

    S. Wild, P. Grieveson andK. H. Jack,ibid. 5 (1972) p. 385.

  10. 10.

    D. S. Thompson andP. L. Pratt,Sci. Ceram. 3 (1967) 33.

  11. 11.

    R. Grün,Acta Crystallogr. B35 (1979) 800.

  12. 12.

    P. Goodman andM. O'keeffe,ibid. B36 (1980) 2891.

  13. 13.

    Y. Bando,ibid. B39 (1983) 185.

  14. 14.

    O. Borgen andH. M. Seip,Acta Chem. Scand. 15 (1961) 1789.

  15. 15.

    R. Marchand, Y. Laurent andJ. Lang,Acta Crystallogr. B25 (1969) 2157.

  16. 16.

    H. F. Priest, F. C. Burns, G. L. Priest andE. C. Skaar,J. Am. Ceram. Soc. 56 (1973) 395.

  17. 17.

    I. Kohatsu andJ. W. McCauley,Mater. Res. Bull 9 (1974) 917.

  18. 18.

    A. J. Edwards, D. P. Elias, M. W. Lindley, A. Atkinson andA. J. Moulson,J. Mater. Sci. 9 (1974) 516.

  19. 19.

    K. Kijima, K. Kato, Z. Inoue andH. Tanaka,ibid. 10 (1975) 362.

  20. 20.

    K. Kato, Z. Inoue, K. Kijima, J. Kawada, H. Tanaka andT. Yamane,J. Am. Ceram. Soc. 58 (1975) 90.

  21. 21.

    K. Blegen, “Special Ceramics”, edited by P. Popper, Vol.6 (George Faulkner Press, Manchester, 1975) 223.

  22. 22.

    S. R. Srinivasa, L. Cartz, J. D. Jorgensen, T. G. Worlto, S. A. Beyerlein andM. Billy,J. Appl. Crystallogr. 10 (1977) 146.

  23. 23.

    I. Colquohoun, S. Wilde, P. Grieveson andK. H. Jack,Proc. B. Ceram. Soc. 22 (1973) 207.

  24. 24.

    H. Feld, P. Ettmayer andI. Petzenhauser,Ber. Deut. Keram. Ges. 51 (1974) 127.

  25. 25.

    S. Hampshire, H. K. Park, D. P. Thompson andK. H. Jack,Nature 274 (1978) 800.

  26. 26.

    M. Peuckert andP. Greil,J. Mater. Sci. 22 (1987) 3717.

  27. 27.

    G. Petzow andR. Sersale,Pure Appl. Chem. 59 (1987) 1673.

  28. 28.

    K. H. Jack, in “Progress in Nitrogen ceramics”, edited by F. L. Riley (Martinus Nijhoff, The Hague, 1983) p 45.

  29. 29.

    Idem, J. Mater. Sci. 11 (1976) 1135.

  30. 30.

    M. H. Lewis, G. L. Ward andC. Jasper,Ceram. Trans. 1B (1988) 1019.

  31. 31.

    D. R. Messier, F. L. Riley andR. J. Brook,J. Mater. Sci. 13 (1978) 1199.

  32. 32.

    M. J. Hoffman andG. Petzow,Mater. Res. Soc. Symp. Proc. 287 (1993) 3.

  33. 33.

    M. Mitomo andY. Tajima,J. Jpn Ceram. Soc. 99 (1991) 1015.

  34. 34.

    H. J. Kleebe, M. K. Cinibulk, R. M. Cannon andM. Rühle,J. Am. Ceram. Soc. 76 (1993) 1969.

  35. 35.

    T. Ekström andM. Nygren,ibid. 75 (1992) 259.

  36. 36.

    G. Z. Cao andR. Metselaar,Chem. Mater. 3 (1991) 242.

  37. 37.

    K. Hiraga, K. Tsuno, D. Shindo, M. Hirabayashi, S. Hayashi andT. Hirai,Philos. Mag. A 47 (1983) 483.

  38. 38.

    K. L. Moore,Proc. Electron Microsc. Soc. Am. 49 (1991) 936.

  39. 39.

    H. Suematsu, J. J. Petrovic andT. E. Mitchell,ibid. 50 (1992) 342.

  40. 40.

    C. M. Wang,Philos. Mag. Lett. 72 (1995) 111.

  41. 41.

    C. M. Wang andF. L. Riley,J. Eur. Ceram. Soc. 16 (1996) 679.

  42. 42.

    C. M. Wang, X. Q. Pan andM. Rühle,J. Mater. Res.,11 (1996) 1682.

  43. 43.

    A. Sawaguchi, K. Toda andK. Niihara,J. Am. Ceram. Soc. 74 (1991) 1142.

  44. 44.

    K. P. Kunz, V. K. Sarin, R. F. Davis andS. R. Bryan,Mater. Sci. Eng. A105/106 (1988) 47.

  45. 45.

    C. M. B. Henderson andD. Taylor,Trans. J. Br. Ceram. Soc. 74 (1975) 49.

  46. 46.

    W. D. Forgeng andB. F. Decker,Trans. Met. Soc. AIME 212 (1958) 343.

  47. 47.

    H. Suzuki,Bull. Tokyo Inst. Technol. 54 (1963) 163.

  48. 48.

    J. Szepvölgyi, F. L. Riley, I. Mohai, I. Bertoti andE. Gilbart,J. Mater. Chem. in press.

  49. 49.

    K. Okada, K. Fukuyama andY. Kameshima,J. Am. Ceram. Soc. 78 (1995) 2021.

  50. 50.

    K. Niihara andT. Hirai,J. Mater. Sci. 12 (1977) 1233.

  51. 51.

    F. Galasso, L. Kuntz andW. J. Croft,J. Am. Ceram. Soc. 55 (1972) 431.

  52. 52.

    K. Niihara andT. Hirai,J. Mater. Sci. 14 (1979) 1952.

  53. 53.

    D. P. Elias andM. W. Lindley,ibid. 11 (1976) 1278.

  54. 54.

    A. J. Moulson,ibid. 14 (1979) 1017.

  55. 55.

    M. W. Lindley, D. P. Elias, B. F. Jones andK. C. Pitman,ibid. 14 (1979) 70.

  56. 56.

    P. Longland andA. J. Moulson,ibid. 13 (1978) 2279.

  57. 57.

    M. Mitomo,ibid. 12 (1977) 273.

  58. 58.

    T. Narushima, N. Ueda, M. Taheuchi, F. Ishii andY. Iguchi,Mater. Trans. JIM 35 (1994) 821.

  59. 59.

    T. Hirai andS. Hayashi,J. Am. Ceram. Soc. 64 (1981) C88.

  60. 60.

    R. M. Laine, F. Babonneau, K. Y. Blowhowiak, R. A. Kennish, J. A. Rahn, G. J. Exarhos andK. Waldner,ibid. 78 (1995) 137.

  61. 61.

    T. Yamada, T. Kawahito andT. Iwai,J. Mater. Sci. Lett. 2 (1983) 275.

  62. 62.

    P. Drew andM. H. Lewis,J. Mater. Sci. 9 (1974) 261.

  63. 63.

    H. Mandal, D. P. Thompson andT. Ekstrom,J. Eur. Ceram. Soc. 12 (1993) 421.

  64. 64.

    M. Kramer, M. J. Hoffmann andG. Petzow,Acta Metall. Mater. 41 (1993) 2939.

  65. 65.

    S. Hampshire andK. H. Jack,Proc. Br. Ceram. Soc. 31 (1981) 37.

  66. 66.

    I. Tanaka, H. J. Kleebe, M. K. Cinibulk, J. Bruley, D. R. Clarke andM. Rühle,J. Am. Ceram. Soc. 77 (1994) 911.

  67. 67.

    C. J. Gasdaska,ibid. 77 (1994) 2408.

  68. 68.

    R. Kossowsky,ibid. 56 (1973) 531.

  69. 69.

    H. Schmid andM. Rühle,J. Mater. Sci. 19 (1984) 615.

  70. 70.

    C. M. Wang, F. L. Riley, F. Castro andI. Iturriza,J. Am. Ceram. Soc. 76 (1993) 2136.

  71. 71.

    C. M. Wang,ibid. 78 (1995) 3393.

  72. 72.

    C. M. Wang, X. Q. Pan, M. Rühle, andF. L. Riley,ibid., submitted.

  73. 73.

    C. M. Wang, (1996) unpublished work.

  74. 74.

    S. L. Wen andJ. W. Feng,Mater. Lett. 4 (1986) 420.

  75. 75.

    R. A. Youngman andT. E. Mitchell,Radiat. Eff. 74 (1983) 267.

  76. 76.

    S. L. Hwang andI. W. Chen,J. Am. Ceram. Soc. 77 (1994) 1711.

  77. 77.

    T. M. Shaw, J. W. Steeds andD. R. Clarke,Mater. Res. Soc. Symp. Proc. 32 (1984) 325.

  78. 78.

    D. S. Zhou andT. E. Mitchell,Philos. Mag. A 72 (1995) 1131.

  79. 79.

    D. S. Zhou andT. E. Mitchell,J. Am. Ceram. Soc. 78 (1995) 3133.

  80. 80.

    H. Hiraga, M. Hirabayashi, S. Hayashi andT. Hirai,ibid. 66 (1983) 539.

  81. 81.

    K. Nuttal andD. P. Thompson,J. Mater. Sci. 9 (1974) 850.

  82. 82.

    S. L. Hwang andI. W. Chen,J. Am. Ceram. Soc. 77 (1994) 2575.

  83. 83.

    Idem, ibid. 77 (1994) 1719.

  84. 84.

    G. W. Groves andA. Kelly,Philos. Mag. 8 (1963) 877.

  85. 85.

    A. G. Evans andJ. V. Sharp,J. Mater. Sci. 6 (1971) 1292.

  86. 86.

    E. Butler,Philos. Mag. 21 (1971) 829.

  87. 87.

    R. Kossowsky,J. Mater. Sci. 8 (1973) 1603.

  88. 88.

    P. M. Marquis,ibid. 12 (1977) 424.

  89. 89.

    W. E. Lee andG. E. Hilmas,J. Am. Ceram. Soc. 72 (1989) 1931.

  90. 90.

    D. Chakraborty andJ. Mukerji,J. Mater. Sci. 15 (1980) 3051.

  91. 91.

    K. Niihara andT. Hirai,ibid. 13 (1978) 2278.

  92. 92.

    W. C. Mackrodt, in “Structures and properties of MgO and A12O3 ceramics”, edited by W. D. Kingery, “Advances in Ceramics”,10 (The American Ceramic Society, Columbus, OH, 1984) p. 62.

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Wang, C.-., Pan, X., Rühle, M. et al. Silicon nitride crystal structure and observations of lattice defects. J Mater Sci 31, 5281–5298 (1996). https://doi.org/10.1007/BF01159294

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Keywords

  • Crystal Structure
  • Nitride
  • Silicon Nitride
  • Structural Nature
  • Lattice Defect