Springer Nature is making SARS-CoV-2 and COVID-19 research free. View research | View latest news | Sign up for updates

Deposition processes and metal cutting applications of TiN coatings

  • 215 Accesses

  • 41 Citations

Abstract

The processing techniques and metal working applications of titanium nitride (TiN) coatings are reviewed. The principal processing techniques are physical vapour deposition (PVD) and chemical vapour deposition (CVD). Individual processes within CVD and PVD are reviewed and the important process parameters identified. Various metal working applications of TiN-coated tools in turning, milling, drilling and other processes, are also reviewed. Finally, future trends and needs in the development and application of TiN coatings are identified and discussed.

This is a preview of subscription content, log in to check access.

References

  1. 1.

    E. P. Degarmo, J. T. Black andR. Kohser, “Materials and Processes in Manufacturing” (Collier-Macmillan, New York, 1989).

  2. 2.

    S. Kalpakjian, “Manufacturing Engineering and Technology” (Addison Wesley, New York, 1989).

  3. 3.

    F. Soddy,Proc. R. Soc. Lond. 78 (1907) 429.

  4. 4.

    I. Langmuir,J. Amer. Chem. Soc. 35 (1913) 931.

  5. 5.

    C. S. Herrick andA. D. Tevebaugh,J. Electrochem. Soc. 110 (1963) 199.

  6. 6.

    E. Ritter,J. Vac. Sci. Technol. 3 (1966) 225.

  7. 7.

    J. R. Rairden,Electrochem. Technol. 6 (1968) 269.

  8. 8.

    P. C. Johnson,Plating Surface Finishing, June (1989) 30.

  9. 9.

    R. F. Bunshah andA. C. Raghuram,J. Vac. Sci. Technol. 9 (1972) 1385.

  10. 10.

    R. F. Bunshah,Thin Solid Films 80 (1981) 255.

  11. 11.

    Idem., ibid. 107 (1983) 21.

  12. 12.

    A. J. Aronson, D. Chen andW. H. Class,ibid. 72 (1980) 535.

  13. 13.

    A. Mumtaz andW. H. Class,J. Vac. Sci. Technol. 20 (1982) 345.

  14. 14.

    J. A. Thornton,Thin Solid Films 80 (1981) 1.

  15. 15.

    W. D. Munz, D. Hofmann andK. Hartig,ibid. 96 (1982) 79.

  16. 16.

    S. Kadlec, J. Musil, W. D. Munz, G. Hakanson andJ. E. Sundgren,Surface Coatings Technol. 39/40 (1989) 487.

  17. 17.

    J. Musil, J. Kadlec, J. Vyskocil andV. Poulek,ibid. 39/40 (1989) 301.

  18. 18.

    W. Bolse, T. Crots, T. Weber, M. Uhrmacher andK. S. Lieb,Thin Solid Films 174 (1989) 139.

  19. 19.

    P. D. Flood,Mech. Engng Trans. Inst. Eng. Australia ME9 (1984) 224.

  20. 20.

    J. A. Thornton,Thin Solid Films 107 (1983) 3.

  21. 21.

    M. Kobayashi andY. Doi,ibid. 54 (1978) 67.

  22. 22.

    B. Zega, M. Kornmann andJ. Amiguet,ibid. 45 (1977) 577.

  23. 23.

    I. Aoki andR. Fukutome,ibid. 30 (1985) 253.

  24. 24.

    E. Moll, R. Buhl, E. Pulker andE. Bergmann,Surface Coatings Technol. 39/40 (1989) 475.

  25. 25.

    H. Randhawa andP. C. Johnson,ibid. 31 (1987) 303.

  26. 26.

    E. Erturk, H. J. Heuvel andH. G. Dederichs,ibid. 39/40 (1989) 455.

  27. 27.

    A. Michalski, A. Sokolowska andS. Legutko,Thin Solid Films 129 (1985) 249.

  28. 28.

    D. G. Bhat, in “Surface Modification Technologies, TMS” edited by T. S. Sudarshan and D. G. Bhat (Metallurgical Society, 1988) pp. 1–21.

  29. 29.

    J. R. Peterson,J. Vac. Sci. Technol. 11 (1974) 715.

  30. 30.

    J. O. Carlsson,Thin Solid Films 130 (1985) 261.

  31. 31.

    S. R. Kurtz andR. G. Gordon,ibid. 140 (1986) 277.

  32. 32.

    Arai et al, (1988).

  33. 33.

    P. J. Mantyla, P. J. Helevirta, T. T. Lepisto andP. T. Siitonen,Thin Solid Films 126 (1985) 275.

  34. 34.

    D. C. Shah andD. G. Bhat, in “International Conference on Surface Modification Techniques”, Paris, edited by T. S. Sudarshan and D. G. Bhat (Metallurgical Society, 1990).

  35. 35.

    A. Matthews andA. R. Lefkow,Thin Solid Films 126 (1985) 283.

  36. 36.

    J. Vogel andR. Bollier, in “Balzers Bulletin”, (Balzers Tool Coating, North Tonawand, NY, 1989) pp. 99–119.

  37. 37.

    D. M. Mattox,Thin Solid Films 124 (1985) 3.

  38. 38.

    C. C. Cheng, A. Erdemir andG. R. Fenske,Surface Coatings Technol. 39/40 (1989) 365.

  39. 39.

    D. S. Rickerby andP. J. Burnett,Thin Solid Films 157 (1988) 195.

  40. 40.

    J. E. Sundgren, B. O. Johansson andS. E. Karlsson,ibid. 105 (1983) 353.

  41. 41.

    G. Byrne andB. Biena, “Wear Resistant Coatings for Cutting Tools”, Paper Presented at the “Fourth International Conference on Surface Modification Technologies”, Paris, France, 6–9 November 1990, edited by T. S. Sudarshan, D. G. Bhat and M. Jeardin (Metallurgical Society) pp. 1–25.

  42. 42.

    W. Schintlmeister andO. Pacher,Metall. 28 (1974) 670.

  43. 43.

    C. Mah, C. W. Nordin andJ. F. Fuller,J. Vac. Sci. Technol. 11 (1974) 371.

  44. 44.

    W. Schintlmeister andO. Pacher,ibid. 12 (1975) 743.

  45. 45.

    W. Schintlmeister, W. Wallgram andJ. Kanz,Thin Solid Films 107 (1983) 117.

  46. 46.

    P. Walsh,Cutting Tool Engng, February (1987) 26.

  47. 47.

    Anon,ibid. (1984) 5.

  48. 48.

    F. J. Teeter andR. Coleman, in “Proceedings of the 1989 Eastern Manufacturing Technology Conference”, 17–19 October, West Springfield, MA (Association for Manufacturing Technology, Virginia, USA, 1989) 97–120.

  49. 49.

    J. Christopher,Cutting Tool Engng, December (1989) 28.

  50. 50.

    H. S. Kalish,Manufact. Engng, September (1978) 58.

  51. 51.

    J. M. Molarius, A. S. Korhonen, H. Kankanpaa andM. S. Sulonen,J. Vac. Sci. Technol. A 4 (1986) 2688.

  52. 52.

    J. M. Molarius, A. S. Korhonen andE. O. Ristoainen,ibid. 3 (1985) 2419.

  53. 53.

    B. E. Jacobson, R. Nimmagadda andR. F. Bunshah,Thin Solid Films 63 (1970) 333.

  54. 54.

    J. E. Sundgren,ibid. 128 (1983) 21.

  55. 55.

    A. K. Suri, R. Nimmagadda andR. F. Bunshah,ibid. 72 (1980) 529.

  56. 56.

    D. T. Quinto, A. T. Santhanam andP. C. Tindal,Mater. Sci. Engng A 105/106 (1988) 443.

  57. 57.

    D. T. Quinto,J. Vac. Sci. Technol. A 6 (1988) 2149.

  58. 58.

    H. Randhawa,ibid. 4 (1986) 2755.

  59. 59.

    J. Vogel andE. Bergmann,ibid. 4 (1986) 2731.

  60. 60.

    E. Bergmann, J. Vogel andL. Simmen,Thin Solid Films 153 (1987) 219.

  61. 61.

    P. A. Dearnley, V. Thompson andA. N. Grearson, in “International Conference on Surface Modifications and Coatings”, Toronto, 1985 (Metallurgical Society) pp. 183–198.

  62. 62.

    Idem., ibid. pp. 199–216.

  63. 63.

    H. E. Rebenne, D. G. Bhat andP. F. Woerner, in “Proceedings of The Third International Conference on Surface Modification”, edited by T. S. Sudarshan and D. G. Bhat (Metallurgical Society, 1989).

  64. 64.

    W. D. Sproul,Thin Solid Films 107 (1983) 141.

  65. 65.

    D. J. Rich andP. F. Woerner,J. Vac. Sci. Technol. A 4 (1986) 2759.

  66. 66.

    D. J. Rich, A. J. Perry andP. F. Woerner,Thin Solid Films 154 (1987) 417.

  67. 67.

    J. J. Oakes,ibid. 107 (1983) 159.

  68. 68.

    G. J. Wolfe, G. J. Petrosky andD. T. Quinto,J. Vac. Sci. Technol. A 4 (1986) 2747.

  69. 69.

    E. Niemi, A. S. Korhonen, E. Harju andV. Karrppinen,ibid. 4 (1986) 2763.

  70. 70.

    W. D. Sproul andR. Rothstein,Thin Solid Films 126 (1985) 257.

  71. 71.

    W. Konig, R. Kauven andA. Droese,Ann. CIRP 36 (1986) 31.

  72. 72.

    M. Valikhani andS. Chandrashekhar,Int. J. Adv. Manufact. Technol. 2 (1987) 75.

  73. 73.

    S. Chandrashekhar, S. Chatterjee andM. Gaiser,Int. J. Product. Res. 28 (1990) 1759.

  74. 74.

    P. D. Flood andP. J. Walsh,Cutting Tool Engng January/February (1982) 4.

  75. 75.

    W. A. Robinson andH. Bell,ibid. August (1987) 40.

  76. 76.

    D. Miskinis, in “Proceedings of the 1989 Eastern Manufacturing Technology Conference”, 17–19 October, West Springfield, MA (Association for Manufacturing Technology, Virginia, USA, 1989) 122–138.

  77. 77.

    J. Pond,Cutting Tool Engng December (1989) 18.

  78. 78.

    J. Coleman,Manufact. Engng January (1990) 38.

  79. 79.

    J. Hunt andA. T. Santhanam, presented at “ASME Winter Annual Meeting”, Dallas, TX, 25–30 November, edited by B. J. Klamecki and K. J. Weinmann (ASME, 1990) pp. 139–156.

  80. 80.

    H. Randhawa,Thin Solid Films 153 (1987) 209.

  81. 81.

    W. D. Sproul,J. Vac. Sci. Technol. A 4 (1986) 2874.

Download references

Author information

Rights and permissions

Reprints and Permissions

About this article

Cite this article

Chatterjee, S., Chandrashekhar, S. & Sudarshan, T.S. Deposition processes and metal cutting applications of TiN coatings. J Mater Sci 27, 3409–3423 (1992). https://doi.org/10.1007/BF01151815

Download citation

Keywords

  • Polymer
  • Titanium
  • Milling
  • Drilling
  • Nitride