The two-step diffusion profile is approximated by a series of gaussian functions. Its accuracy is dependent upon the number of terms used in the series, but independent of the number and the spacing of exact data points.
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Lee, W., Wang, W. Approximation to the two-step diffusion profile by a series of gaussian functions. Appl. Phys. A 46, 281–283 (1988). https://doi.org/10.1007/BF01141593