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Reflection of KrF laser radiation from silicon surfaces with various coatings

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Conclusion

We have measured the coefficients of reflection of KrF-laser radiation from a silicon surface, and also from its coating films SiO2, Al, PSG, and their combinations. We have shown that specular reflection from a silicon surface with various films can vary in intensity not only on account of the change of absorption in the material, but also as a result of scattering of the radiation by the surface waves that are rapidly produced after the silicon melting.

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Additional information

Translated from a preprint (manuscript) of the Lebedev Physics Institute, Russian Academy of Sciences, Moscow.

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Barabanov, V.S., Kantsyrev, V.L., Morozov, N.V. et al. Reflection of KrF laser radiation from silicon surfaces with various coatings. J Russ Laser Res 14, 421–425 (1993). https://doi.org/10.1007/BF01121884

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Keywords

  • Radiation
  • Silicon
  • Reflection
  • SiO2
  • Laser Radiation