Numerical calculation of directional diagrams and profiles of evaporators with an accelerating nozzle
Approximate Solution Methods for Problems of Mechanics
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Abstract
We investigate the possibility of achieving optimal directional diagrams of molecular flow and optimal profiles in evaporators with an accelerating nozzle. The numerical calculations elucidate the factors that have an essential effect on the thickness and uniformity of the coating formed by metal vapors on the substrate.
Keywords
Numerical Calculation Metal Vapor Essential Effect Directional Diagram Molecular Flow
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© Plenum Publishing Corporation 1992