Applied Physics B

, Volume 61, Issue 6, pp 585–592 | Cite as

Absolute concentration measurements of C2 in a diamond CVD reactor by laser-induced fluorescence

  • C. Kaminski
  • P. Ewart
Article

Abstract

By use of Laser-Induced Fluorescence (LIF) the absolute concentration of the C2 radical in a microwave excited diamond chemical vapour deposition plasma has been measured for the first time. LIF spectra of thed3Πga3Πu (1,0) Swan band near 473 nm were recorded and synthesized theoretically allowing the plasma temperature of 2100 ± 200 K to be inferred. Quenching rates were determined from time-resolved measurements of the fluorescence decay. By calibrating the LIF detection system, using spontaneous Raman scattering in H2 in the reactor vessel, the absolute concentration of C2 was determined to be (7.5 ± 1.7) × 1010 cm−3. Observations of the C2 density under varying plasma conditions are reported.

PACS

07.65 33.00 

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Copyright information

© Springer-Verlag 1995

Authors and Affiliations

  • C. Kaminski
    • 1
  • P. Ewart
    • 1
  1. 1.Clarendon LaboratoryOxford UniversityOxfordUK

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