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Gas-phase photolysis of tungsten hexachloride

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Abstract

The laser-induced decomposition of WCl6 in the gas-phase is investigated by means of absorption, Raman and laser-induced fluorescence spectroscopy. With visible Ar+-laser radiation dissociation of WCl6 into WCl4 and Cl2 has been observed. Further decomposition can be achieved in the presence of H2 employing ultraviolet Ar+-laser radiation at 360 nm. A complete reduction to W requires even shorter wavelengths. The experimental results are analyzed on the basis of model calculations. Implications on the Laser-induced Chemical Vapor Deposition (LCVD) of W are discussed.

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References

  1. 1.

    Y. Pauleau: Thin Solid Films122, 243 (1984)

  2. 2.

    K.Y. Ahn: Thin Solid Films153, 469 (1987)

  3. 3.

    R. Kullmer, P.B. Kargl, D. Bäuerle: Thin Solid Films218, 122 (1992)

  4. 4.

    N. Arnold, R. Kullmer, D. Bäuerle: Microelectron. Eng.20, 31 (1993)

  5. 5.

    P.B. Kargl, R. Kullmer, D. Bäuerle: Appl. Phys. A57, 31 (1993)

  6. 6.

    D. Bäuerle:Chemical Processing with Lasers, Springer Ser. Mater. Sci., Vol. 1 (Springer, Berlin, Heidelberg 1986)

  7. 7.

    D. Bäuerle: InLaser Processing and Diagnostics, Springer Ser. Chem. Phys., Vol. 39 (Springer, Berlin, Heidelberg 1984) p. 166, and references cited therein D. Bäuerle, K.L. Kompa, L.D. Laude (eds.):Laser Processing and Diagnostics II (Editions Physique, Les Ulis 1986) A.W. Johnson, D.J. Ehrlich, H.R. Schlossberg (eds.):Laser Controlled Chemical Processing of Surfaces (North-Holland, New York 1984) R.M. Osgood, S.R.J. Brueck, H.R. Schlossberg (eds.):Laser Diagnostics and Photochemical Processing for Semiconductor Devices (North-Holland, New York 1983)

  8. 8.

    G.Q. Zhang, T. Szörényi, D. Bäuerle: J. Appl. Phys.62, 673 (1987)

  9. 9.

    T. Szörényi, K. Piglmayer, G.Q. Zhang, D. Bäuerle: Surf. Sci.202, 442 (1988)

  10. 10.

    Y. Saeki, T. Takuma, R. Matsuzaki, K. Funaki: Denki Kagaku39, 384 (1971)

  11. 11.

    F.D. Stevenson, C.E. Wicks, R.E. Block: U.S. Bureau of Mines, Rept. Invest.6367 (1964)

  12. 12.

    M.W. Chase, C.A. Davies, J.R. Downey, D.J. Frurip, R.A. McDonald, A.N. Syverud (eds.):JANAF Thermochemical Tables, 3rd edn., J. Phys. Chem. Ref. Data14, Suppl. 1. (1985)

  13. 13.

    R.J. Meyer (ed.):Gmelins Handbuch der Anorganischen Chemie, Vol. 54 (VCH, Weinheim 1993)

  14. 14.

    P.B. Kargl: Laser-induzierte Abscheidung von Wolfram-Mikrostrukturen aus WCl6. Diploma Thesis, Universität Linz (1992)

  15. 15.

    E. Thorn-Csány, H. Timm: J. Mol. Catal.28, 37 (1985)

  16. 16.

    Yu.S. Ezhov, S.A. Komarov: Russ. J. Struct. Chem. (Engl. Transl.)25, 71 (1984)

  17. 17.

    Yu.S. Ezhov, A.P. Sarvin: Russ. J. Struct. Chem. (Engl. Transl.)24, 140 (1983)

  18. 18.

    A.E. Douglas, C.K. Møller, B.P. Stoicheff: Can. J. Phys.41 1174 (1963)

  19. 19.

    M.A.A. Clyne, J.A. Coxon: J. Mol. Spectrosc.33, 381 (1970)

  20. 20.

    M.A.A. Clyne, I.S. McDermid: J. Chem. Soc., Faraday Trans. 274, 1985 (1978);75, 280 (1979);75, 1313 (1979);75, 1677 (1979) M.A.A. Clyne, E. Martinez: J. Chem. Soc., Faraday Trans. 276, 1275 (1980);76, 1561 (1980)

  21. 21.

    J.A. Creighton: Chem. Commun.1969, 163 (1969)

  22. 22.

    T.L. Brown, W.G. McDugle, L.G. Kent: J. Chem. Soc.92, 3645 (1970)

  23. 23.

    G.A. Ozin: Prog. Inorg. Chem.14, 173 (1971)

  24. 24.

    K. Tanemoto, G. Mamantov, G.M. Begun: Inorg. Chimica Acta76, L79 (1983)

  25. 25.

    A.C. Albrecht: J. Chem. Phys.34, 1476 (1961)

  26. 26.

    Y.M. Bosworth, R.J.H. Clark: J. Chem. Soc., Dalton Trans.1974, 1749 (1974)

  27. 27.

    G. Herzberg:Molecular Spectra and Molecular Structure II (Van Nostrand Reinhold, New York 1945)

  28. 28.

    G. Placzek, E. Teller: Z. Phys.81, 209 (1933)

  29. 29.

    F.N. Masri, W.H. Fletcher: J. Chem. Phys.52, 5759 (1970)

  30. 30.

    R.S. McDowell, R.C. Kennedy, L.B. Asprey, R.J. Sherman: J. Mol. Struct.36, 1 (1977)

  31. 31.

    O. Madelung (ed.):Landolt-Börnstein, New Series, Vol. 15, (Springer, Berlin, Heidelberg 1987)

  32. 32.

    G.W. Chantry: InThe Raman Effect, ed. by A. Anderson (Dekker, New York 1971)

  33. 33.

    Y. Saeki, R. Matsuzaki: J. Less-Common Met.33, 313 (1973)

  34. 34.

    M.A.A. Clyne, D.H. Stedman: J. Chem. Soc., Faraday Trans. 264, 1816 (1968);64, 2698 (1968)

  35. 35.

    M.A.A. Clyne, D.J. Smith: J. Chem. Soc., Faraday Trans. 275, 704 (1979)

  36. 36.

    P. Mogyorósi, K. Piglmayer, R. Kullmer, D. Bäuerle: Appl. Phys. A45, 293 (1988)

  37. 37.

    R.J. Meyer (ed.):Gmelins Handbuch der Anorganischen Chemie, Vol. 6 (VCH, Weinheim 1968)

  38. 38.

    E. Lax, C. Synowietz (eds.):Taschenbuch für Chemiker und Physiker (Springer, Berlin, Heidelberg 1967)

  39. 39.

    V.S. Lethokhov:Nonlinear Laser Chemistry, Springer Ser. Chem. Phys., Vol. 22 (Springer, Berlin, Heidelberg 1983)

  40. 40.

    S.A. Shchukarev, G.I. Novikov, I.V. Vasil'kova, A.V. Suvorov, N.V. Andreeva, B.N. Sharupin, A.K. Baev: Russ. J. Inorg. Chem. (Engl. Transl.)5, 802 (1960)

  41. 41.

    A.A. Frost, R.G. Pearson:Kinetik und Mechanismen homogener chemischer Reaktionen (VCH, Weinheim 1973)

  42. 42.

    K.J. Laidler:Reaktionskinetik I (Bibliographisches Institut, Mannheim 1970)

  43. 43.

    G. Dittmer, U. Niemann: Philips J. Res.36, 89 (1981)

  44. 44.

    M. Grayson (ed.):Encyclopedia of Chemical Technology, Vol. 23 (Wiley, New York 1983)

  45. 45.

    K. Nakamoto:Infrared and Raman Spectra of Inorganic and Coordination Compounds (Wiley, New York 1978)

  46. 46.

    R. Kullmer, D. Bäuerle: Unpublished results

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Kullmer, R. Gas-phase photolysis of tungsten hexachloride. Appl. Phys. B 59, 25–36 (1994). https://doi.org/10.1007/BF01081725

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PACS

  • 82.50
  • 33.80.Gj
  • 81.15.- z