Plasma Chemistry and Plasma Processing

, Volume 7, Issue 1, pp 29–52 | Cite as

Heating of powders in an r.f. inductively coupled plasma under dense loading conditions

  • Pierre Proulx
  • Javad Mostaghimi
  • Maher I. Boulos
Article

Abstract

A study was carried out of the heating of powders in an r.f. inductively coupled plasma under dense loading conditions. The results obtained using a mathematical model taking into account plasma-particle interaction effects reveal an important cooling of the plasma caused by the presence of the particles. This, in turn, gave rise to a corresponding drop of the efficiency of the melting of the particles in the plasma. The effect is shown to depend strongly on the thermodynamic properties of the material of the powder.

Key Words

r.f. plasma mathematical modelling temperature and flow fields plasma-particle interaction 

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Copyright information

© Plenum Publishing Corporation 1987

Authors and Affiliations

  • Pierre Proulx
    • 1
  • Javad Mostaghimi
    • 1
  • Maher I. Boulos
    • 1
  1. 1.Département de génie chimiqueUniversité de SherbrookeSherbrookeCanada

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