Plasma Chemistry and Plasma Processing

, Volume 9, Issue 1, pp 25–44

Two-dimensional electromagnetic field effects in induction plasma modelling

  • Javad Mostaghimi
  • Maher I. Boulos
Article

Abstract

Based on the electromagnetic vector potential representation, a two-dimensional, axisymmetric model is proposed for the calculation of the electromageetic fields in an inductively coupled, radiofrequency (r.f.) plasma. A comparative analysis made between the flow, temperature, and electromagnetic fields obtained using this model and those given by our earlier one-dimensional electromagnetic fields model show relatively little difference between the temperature fields predicted by the two models. Significant differences are observed, however, between the corresponding flow and electromagnetic fields. The new model offers an effective means of accounting for variations in the coil geometry on the flow and temperature fields in the discharge and for achieving a better representation of the electromagnetic fields under higher frequency conditions (f>10 MHz).

Key Words

Modelling induction plasmas flow and temperature field two-dimensional electromagnetic fields 

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Copyright information

© Plenum Publishing Corporation 1989

Authors and Affiliations

  • Javad Mostaghimi
    • 1
  • Maher I. Boulos
    • 1
  1. 1.Department of Chemical EngineeringUniversity of SherbrookeSherbrookeCanada

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