High-resolution detection of defects by one dimensional spatial filtering
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Abstract
The capabilities of a one-dimensional filtering method for the detection of defects in periodic structures are derived by a detailed theoretical analysis. The signal-to-noise ratio is evaluated as a function of system parameters and a way is described to overcome the disturbing effect of phase defects. Finally, an extremely simple system is described which demonstrated the detection of defects below 2 μm. This demonstrated detection capability was limited by the available test mask and not by the detection system.
PACS
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References
- 1.J.Shamir: Proc. 10th Conv. of IEEE in Israel (Oct. 1977) Tel Aviv (C/4/11)Google Scholar
- 2.J.D.Knox, P.L.Goedertier, P.Fairbanks, F.Capuri: Solid State Tech., pp. 48–51 (May 1977)Google Scholar
- 3.L.S.Watkins: Proc. IEEE57, 1634–1639 (1969)Google Scholar
- 4.G.Winzer, N.Douklias, H.P.Kraft: Frequence25, 220–226 (1971)Google Scholar
- 5.D.R.Ciarlo: Lawrence Livermore Lab., Rept. UCID 17141, May 24 (1976)Google Scholar
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© Springer-Verlag 1979