The Monte Carlo method has been used to examine the migration of sputtered atoms, whose transport may be described by a diffusion equation. The position of the virtual source in the plasma is determined. The energy relaxation has also been examined by experiment. The theoretical and experimental results are in agreement.
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Translated from Izvestiya Vysshikh Uchebnykh Zavedenii, Fizika, No. 10, pp. 3–8, October, 1982.
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Zhiglinskii, A.G., Izmailov, A.M., Kuchinskii, V.V. et al. Sputtered-atom energy relaxation in a plasma. Soviet Physics Journal 25, 869–873 (1982). https://doi.org/10.1007/BF00891653
- Monte Carlo Method
- Diffusion Equation
- Energy Relaxation
- Virtual Source