Springer Nature is making Coronavirus research free. View research | View latest news | Sign up for updates

Sputtered-atom energy relaxation in a plasma

  • 16 Accesses

  • 1 Citations

Abstract

The Monte Carlo method has been used to examine the migration of sputtered atoms, whose transport may be described by a diffusion equation. The position of the virtual source in the plasma is determined. The energy relaxation has also been examined by experiment. The theoretical and experimental results are in agreement.

This is a preview of subscription content, log in to check access.

Literature cited

  1. 1.

    R. Basic and J. J. Daniere, Phys. D: Appl. Phys.,3, 586 (1970).

  2. 2.

    N. V. Pleshivtsev, Cathode Sputtering [in Russian], Atomizdat, Moscow (1968).

  3. 3.

    L. D. Landau and E. M. Lifshits, Mechanics [in Russian], Nauka, Moscow (1971).

  4. 4.

    A. D. Frank-Kamenetskii, Simulation of Neutron Paths in Reactor Calculations by Monte Carlo Methods [in Russian], Atomizdat, Moscow (1978).

  5. 5.

    V. V. Dunaev, Author's Abstract of Candidate's Dissertation, Leningrad (1979).

  6. 6.

    K. Tokayanagi, Sci. Rep. Saitama Univ.,A3, 87 (1959).

  7. 7.

    T. N. Khlopina, Author's Abstract of Candidate's Dissertation, Leningrad (1971).

  8. 8.

    R. V. Stuart and G. K. J. Wehner, Appl. Phys.,15, 1819 (1964).

  9. 9.

    T. Baum, Z. Phys.,40, 686 (1927).

  10. 10.

    G. K. J. Wehner, Appl. Phys.,31, 1392 (1960).

Download references

Author information

Additional information

Translated from Izvestiya Vysshikh Uchebnykh Zavedenii, Fizika, No. 10, pp. 3–8, October, 1982.

Rights and permissions

Reprints and Permissions

About this article

Cite this article

Zhiglinskii, A.G., Izmailov, A.M., Kuchinskii, V.V. et al. Sputtered-atom energy relaxation in a plasma. Soviet Physics Journal 25, 869–873 (1982). https://doi.org/10.1007/BF00891653

Download citation

Keywords

  • Migration
  • Monte Carlo Method
  • Diffusion Equation
  • Energy Relaxation
  • Virtual Source