Advertisement

Springer Nature is making SARS-CoV-2 and COVID-19 research free. View research | View latest news | Sign up for updates

Analytical approximate equations for the resistivity and its temperature coefficient in thin polycrystalline metallic films

Abstract

In the usual thickness range of sputtered metallic films, analytical linearized approximate expressions of polycrystalline film resistivity and its t.c.r. are deduced from the Mayadas-Shatzkes theoretical equations. A good experimental fit is observed for Al rf sputtered metal films.

This is a preview of subscription content, log in to check access.

References

  1. 1.

    A.F.Mayadas, M.Shatzkes: Phys. Rev. B1, 1382 (1970)

  2. 2.

    A.Singh: Thin Films2, 159 (1972)

  3. 3.

    A.Singh: Proc. IEEE61, 1653 (1973)

  4. 4.

    A.Singh: J. Appl. Phys.45, 1908 (1974)

  5. 5.

    E.E.Mola, J.M.Heras: Thin Solid Films18, 137 (1973)

  6. 6.

    B.Singh, C.C.Ling, N.A.Surplice: Thin Solid Films23, S50 (1974)

  7. 7.

    C.R.Tellier, A.J.Tosser: Thin Solid Films43, 261 (1977)

  8. 8.

    C.R.Tellier, A.J.Tosser: Thin Solid Films33, L19 (1976)

  9. 9.

    J.Borrajo, J.M.Heras: Thin Solid Films18, 267 (1973)

  10. 10.

    C.R.Tellier, A.J.Tosser: Thin Solid Films35, 65 (1976)

  11. 11.

    C.R.Tellier, A.J.Tosser: Thin Solid Films37, 207 (1976)

  12. 12.

    A.Tosser, C.Tellier, J.Launey: Int. Symp. on Vacuum and Thin Film Technol., Uppsala (Sweden 1976) Abstr. E31, p. 50

  13. 13.

    B.Laville Saint Martin: Thin Solid Films5, 169 (1969)

  14. 14.

    B.Laville Saint Martin: Thin Solid Films6, 359 (1969)

  15. 15.

    C.R.Tellier, R.C.Boutrit, A.J.Tosser: Internal note, University of Nancy (1977)

Download references

Author information

Rights and permissions

Reprints and Permissions

About this article

Cite this article

Tellier, C.R., Tosser, A.J. Analytical approximate equations for the resistivity and its temperature coefficient in thin polycrystalline metallic films. Appl. Phys. 14, 221–224 (1977). https://doi.org/10.1007/BF00883093

Download citation

PACS Code

  • 68.55