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Effects of an sem video system on the accuracy in element size determination

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Additional information

Translated from Izmeritel'naya Tekhnika, No. 2, pp. 30–31, February, 1990.

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Zheleznov, V.V., Kochetkov, V.Y. & Nikitin, A.V. Effects of an sem video system on the accuracy in element size determination. Meas Tech 33, 134–136 (1990). https://doi.org/10.1007/BF00866268

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Keywords

  • Physical Chemistry
  • Analytical Chemistry
  • Element Size
  • Size Determination
  • Video System