Soviet Physics Journal

, Volume 13, Issue 6, pp 758–761 | Cite as

Probe measurement of the Hall carrier mobility in high-resistivity epitaxial semiconducting films

  • N. N. Polyakov
  • V. L. Kon'kov
Article
Received:

Abstract

A multiprobe method is proposed for measuring the Hall carrier mobility of high-resistivity epitaxial semiconducting films. The corresponding boundary-value problem is solved to obtain an equation giving the Hall carrier mobility in terms of experimental results. Values of a factor which appears in this equation and which depends on the sample geometry and probe arrangement are tabulated.

Keywords

Probe Measurement Carrier Mobility Sample Geometry Probe Arrangement Semiconducting Film 
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Literature cited

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Copyright information

© Consultants Bureau 1973

Authors and Affiliations

  • N. N. Polyakov
    • 1
  • V. L. Kon'kov
    • 1
  1. 1.A. M. Gor'kii Gor'kii State Pedagogical InstituteUSSR

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