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Journal of Materials Science Letters

, Volume 3, Issue 3, pp 217–220 | Cite as

Low temperature diffusion measurements on d.c. sputtered multilayers of Nb/Ta

  • R. E. Somekh
  • Z. H. Barber
  • C. S. Baxter
  • P. E. Donovan
  • J. E. Evetts
  • W. M. Stobbs
Article

Keywords

Polymer Diffusion Measurement Temperature Diffusion 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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References

  1. 1.
    H. E. COOK and J. E. HILLIARD,J. Appl. Phys. 40 (1969) 2191.Google Scholar
  2. 2.
    W. M. PAULSON and J. E. HILLIARD, ibid.48 (1977) 2117.Google Scholar
  3. 3.
    T. TSAKALAKOS,Thin Solid Films 86 (1981) 79.Google Scholar
  4. 4.
    R. C. CAMMARATA and A. L. GREER, “Interdiffusion Studies in Metallic Glasses using Compositionally Modulated Thin Films” in Proceedings of the Fifth International Conference on Liquid and Amorphous Metals, Los Angeles, California, August 1983 (to be published).Google Scholar
  5. 5.
    I. K. SCHULLER,Phys. Rev. Lett. 44 (1980) 1597.Google Scholar
  6. 6.
    S. M. DURBIN, J. E. CUNNINGHAM, M. E. MOCHEL and C. P. FLYNN,J. Phys. F Metal Phys. 11 (1981) L223.Google Scholar
  7. 7.
    I. K. SCHULLER and C. M. FALCO,Surf. Sci. 113 (1982) 443.Google Scholar
  8. 8.
    R. E. SOMEKH, “Thermalisation of energetic atoms during sputtering” (to be publishedJ. Vac. Sci. Technol.).Google Scholar
  9. 9.
    L. L. VERGASOVA, D. A. PROKOSHKIN and E. V. VASILEVA,Russ. Met. R. 4 (1970) 144.Google Scholar
  10. 10.
    T. OGASAWARA, Y. KUBOTA and K. YASUKOCHI,J. Phys. Soc. Jpn. 25 (1968) 1307.Google Scholar
  11. 11.
    C. C. KOCH, J. O. SCARBOROUGH and D. M. KROEGER,Phys. Rev. B9 (1974) 888.Google Scholar

Copyright information

© Chapman and Hall Ltd 1984

Authors and Affiliations

  • R. E. Somekh
    • 1
  • Z. H. Barber
    • 1
  • C. S. Baxter
    • 1
  • P. E. Donovan
    • 1
  • J. E. Evetts
    • 1
  • W. M. Stobbs
    • 1
  1. 1.Department of Metallurgy and Materials ScienceUniversity of CambridgeCambridgeUK

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