Formation of microcrystallinity in hydrogenated silicon films deposited with a simple modification of the magnetron sputtering method
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Polymer Silicon Simple Modification Silicon Film Hydrogenate Silicon Film
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References
- 1.P. M. FAUCHET, K. TANAKA and C. C. TSAI (editors), in Proceedings of the MRS Fall Meeting, Symposium H, Boston, USA, 1989, MRS Symposium Proceedings, Vol. 164.Google Scholar
- 2.S. RAY, S. C. DE and A. K. BARUA,Thin Solid Films 156 (1988) 277.Google Scholar
- 3.J. DUTTA, A. L. UNAOGU, S. RAY and A. K. BARUA,J. Appl. Phys. 66 (1989) 4709.Google Scholar
- 4.T. D. MOUSTAKAS, H. PAUL MARUSKA and R. FRIEDMAN, ibid.58 (1985) 983.Google Scholar
- 5.Y. Z. SUN, S. R. DAS, D. F. WILLIAMS and J. B. WEBB, ibid.59 (1986) 3160.Google Scholar
- 6.W. MULLER, J. PIRRUNG, B. SCHRODER and J. GEIGER,Sol. Energy Mater. 10 (1984) 171.Google Scholar
- 7.A. K. BATABYAL, R. BANERJEE, A. K. BANDYOPADHYAY and A. K. BARUA,Jpn. J. Appl. Phys. 27 (1988) L1806.Google Scholar
- 8.A. K. BATABYAL, P. CHAUDHURI, S. RAY and A. K. BARUA,Thin Solid Films 112 (1984) 51.Google Scholar
- 9.Z. IQBAL and S. VEPREK,J. Phys. C 15 (1982) 377.Google Scholar
- 10.C. C. TSAI, G. B. ANDERSON, R. THOMPSON and B. WACKER,J. Non-Cryst. Solids 114 (1989) 151.Google Scholar
- 11.R. C. VAN OORT, M. J. GEERTS and J. C. VAN DEN HEUVEL,Appl. Surf. Sci. 36 (1989) 164.Google Scholar
- 12.A. MATSUDA, K. NAKAGAWA, K. TANAKA, M. MATSUMURA, S. YAMASAKI, H. OKUSHI and S. HZIMA,J. Non-Cryst. Solids 35–36 (1980) 183.Google Scholar
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© Chapman & Hall 1991