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Journal of Materials Science Letters

, Volume 10, Issue 2, pp 83–84 | Cite as

Plasma etching of non-oxide ceramics

  • M. Mitomo
  • Y. Sato
  • I. Yashima
  • M. Tsutsumi
Article

Keywords

Polymer Plasma Etching 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Chapman and Hall Ltd 1991

Authors and Affiliations

  • M. Mitomo
    • 1
  • Y. Sato
    • 1
  • I. Yashima
    • 1
  • M. Tsutsumi
    • 1
  1. 1.National Institute for Research in Inorganic MaterialsIbarakiJapan

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