Modern Analytical Chemistry provides important information about the development of microelectronic materials and devices especially when the most highly integrated computer memory chips are regarded. Here the analytical requirements for the IC fabrication process are briefly reviewed.
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Werner HW (1988) Diagnostic techniques for micro-electronic materials, processes and devices. Proc NATO Adv Study Institute. In: Levi RA (ed) Microelectronic materials and processes. Niijhoff, Amsterdam
Grasserbauer M, Stingeder G (1990) Fresenius J Anal Chem 337:701
Kolbesen BO, Pamler W (1989) Fresenius Z Anal Chem 333: 561
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Stingeder, G. The challenge of microelectronics for analytical chemistry. Fresenius J Anal Chem 343, 771–772 (1992). https://doi.org/10.1007/BF00633564
- Physical Chemistry
- Analytical Chemistry
- Inorganic Chemistry
- Fabrication Process
- Computer Memory