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The challenge of microelectronics for analytical chemistry


Modern Analytical Chemistry provides important information about the development of microelectronic materials and devices especially when the most highly integrated computer memory chips are regarded. Here the analytical requirements for the IC fabrication process are briefly reviewed.

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Stingeder, G. The challenge of microelectronics for analytical chemistry. Fresenius J Anal Chem 343, 771–772 (1992).

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  • Physical Chemistry
  • Analytical Chemistry
  • Inorganic Chemistry
  • Fabrication Process
  • Computer Memory