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Fabrication of efficient phase gratings using deep u. v. lithography

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Kodate, K., Takenaka, H. & Kamiya, T. Fabrication of efficient phase gratings using deep u. v. lithography. Opt Quant Electron 14, 85–88 (1982). https://doi.org/10.1007/BF00620916

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Keywords

  • Communication Network
  • Phase Grating
  • Efficient Phase