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New types of periodic structures in laser-induced chemical vapor deposition

Abstract

New types of periodic structures that occur in laser-induced chemical vapor deposition have been investigated, mainly for polycrystalline Si deposited on glass substrates covered with a thin amorphous Si layer. These periodic structures, which are believed to be a general phenomenon in pyrolytic laser-induced processing, limit the resolution obtainable in direct writing of patterns.

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On leave from Fudan University, Department of Electronic Engineering, Shanghai, People's Republic of China

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Du, Y.C., Kempfer, U., Piglmayer, K. et al. New types of periodic structures in laser-induced chemical vapor deposition. Appl. Phys. A 39, 167–171 (1986). https://doi.org/10.1007/BF00620731

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PACS

  • 42.60. -v
  • 81.15 Gh
  • 68.20. +t