Advertisement

Springer Nature is making SARS-CoV-2 and COVID-19 research free. View research | View latest news | Sign up for updates

Surface structures on crystalline silicon irradiated by 10 ps laser pulses at 694.3 nm

Abstract

The grating-like spatially periodic structures are produced on the (100) surfaces of the single crystal silicon by the trains of 10 ps mode-locked ruby laser pulses at the wavelength of 694.3 nm. The periods and orientations of the structures are consistent with the model which involves the interference of the incident light with the surface electromagnetic wave excited through the coupling by surface roughness. Previously unappreciated elliptic ripple patterns are found and explained as the trails of the capillary wave excited on the molten Si surface due to the radially non-uniform deposition of energy.

This is a preview of subscription content, log in to check access.

References

  1. 1.

    M. Birnbaum: J. Appl. Phys.36, 3688–3689 (1965)

  2. 2.

    D.C. Emmony, R.P. Howson, L.J. Willis: Appl. Phys. Lett.23, 598–600 (1973)

  3. 3.

    N.R. Isenor: Appl. Phys. Lett.31, 148–150 (1977)

  4. 4.

    H.J. Leamy, G.A. Rozgonyi, T.T. Sheng, G.K. Celler: Appl. Phys. Lett.32, 535–537 (1978)

  5. 5.

    F. Keilmann, Y.H. Bai: Appl. Phys.A29, 9–18 (1982)

  6. 6.

    P.M. Fauchet, A.E. Siegman: Appl. Phys. Lett.40, 824–826 (1982)

  7. 7.

    D.J. Ehrlich, S.R.J. Brueck, J.Y. Tsao: Appl. Phys. Lett.41, 630–632 (1982)

  8. 8.

    J.F. Young, J.S. Preston, H.M. van Driel, J.E. Sipe: Phys. Rev.B27, 1155–1172 (1983)

  9. 9.

    A.B. Siegman, P.M. Fauchet: IEEE J. QE-22, 1384–1403 (1986)

  10. 10.

    Zhou Guosheng, P.M. Fauchet, A.E. Siegman: Phys. Rev. B26, 5366–5381 (1982)

  11. 11.

    J.E. Sipe, J.F. Young, J.S. Preston, H.M. van Driel: Phys. Rev. B27, 1141–1154 (1983)

  12. 12.

    V.I. Emel'yanov, E.M. Zemskov, V.N. Seminogov: Sov. J. Quantum Electron.13, 1556–1561 (1984)

  13. 13.

    H.M. van Driel, J.F. Young, J.E. Sipe: InLaser-Solid Interactions and Transient Thermal Processing of Materials, ed. by J. Narayan, W.L. Brown, R.A. Lemons (North-Holland, New York 1983) pp. 197–206

  14. 14.

    G.N. Maracas, G.L. Harris, C.A. Lee, R.A. McFarlane: Appl. Phys. Lett.33, 453–455 (1978)

  15. 15.

    D. Haneman, R.J. Nemanich: Solid State Commun.43, 203–206 (1982)

  16. 16.

    D.O. Boerma, H. Hasper, K.G. Prasad: Phys. Lett.93A, 253–256 (1983)

  17. 17.

    The dielectic function was calculated from the experimental data of K.M. Sharev, B.A. Baum, P.V. Gel'd: Sov. Phys. Solid State16, 2111 (1975)

  18. 18.

    G.N. Zhinzhin, M.A. Moskalova, E.V. Shomina, V.A. Yakovlev: InSurface Polaritons, ed. by V.M. Agranovich, D.L. Mills (North-Holland, Amsterdam, 1982) pp. 93–109

  19. 19.

    C.T. Walters: Appl. Phys. Lett.25, 696–698 (1974)

  20. 20.

    K. Affolter, W. Lüthy, M. Wittmer: Appl. Phys. Lett.36, 559 (1980)

  21. 21.

    W.J. Duncan, A.S. Thorm, A.D. Young:Mechanics of Fluid, 2nd edn. (Arnold, Belfast 1971) pp. 549–554

  22. 22.

    P. Baeri, S.U. Campisano: InLaser Annealing of Semiconductors, ed. by J.M. Poate, J.W. Mayer (Academic, New York 1982) pp. 75–105

  23. 23.

    L.D. Landau, E.M. Lifshitz:Fluid Mechanics (Pergammon, Oxford 1959) pp. 237–241

  24. 24.

    L.E. Murr:Interfacial Phenomena in Metals and Alloys (Addison-Wesley, London 1975) p. 104

Download references

Author information

Rights and permissions

Reprints and Permissions

About this article

Cite this article

Lee, T.D., Lee, H.W., Kim, J.K. et al. Surface structures on crystalline silicon irradiated by 10 ps laser pulses at 694.3 nm. Appl. Phys. A 48, 475–479 (1989). https://doi.org/10.1007/BF00619721

Download citation

PACS

  • 79.20.Ds
  • 81.40.-z
  • 42.80.Fn
  • 47.35.+i