Springer Nature is making SARS-CoV-2 and COVID-19 research free. View research | View latest news | Sign up for updates

Phenomenology of picosecond heating and evaporation of silicon surfaces coated with SiO2 layers

Abstract

Picosecond time-resolved reflectivity measurements on bare silicon surfaces and silicon surfaces with oxide layers reveal very fast heat diffusion and material evaporation on subnanosecond time scales. With a thick oxide layer resolidification of a molten silicon surface can take place in a few hundred picoseconds. At high laser fluences, vaporization processes take only a couple of 100 ps.

This is a preview of subscription content, log in to check access.

References

  1. 1.

    J. Narayan, W.L. Brown, R.A. Lemons (eds.):Laser-Solid Interactions and Transient Thermal Processing of Materials (North-Holland, New York 1983)

  2. 2.

    J.C.C. Fan, N.M. Johnson (eds.):Energy Beam-Solid Interactions and Transient Thermal Processing, Materials Research Society Conference Proceedings (1983)

  3. 3.

    C.V. Shank, R. Yen, C. Hirliaman: Phys. Rev. Lett.50, 454 (1983); also in [1,2]

  4. 4.

    L.A. Lompre, J.M. Liu, H. Kurz, N. Bloembergen: Appl. Phys. Lett.43, 168 (1983)

  5. 5.

    J.M. Liu, H. Kurz, N. Bloembergen: Appl. Phys. Lett.41, 643 (1982)

  6. 6.

    J.M. Liu: Ph.D. Thesis, Harvard University (1982)

  7. 7.

    R.H. Hendel, D.D. Casey, C.U. Bickford: J. Vac. Sci. Technol.18, 818 (1981)

  8. 8.

    J.M. Liu, R. Yen, H. Kurz, N. Bloembergen: Appl. Phys. Lett.39, 755 (1981)

  9. 9.

    H.F. Wolf:Silicon Semiconductor Data (Pergamon Press, Oxford 1969) pp. 642–644

  10. 10.

    H.F. Wolf:Semiconductors (Wiley, New York 1971) p. 375

Download references

Author information

Rights and permissions

Reprints and Permissions

About this article

Cite this article

Liu, J.M., Lompre, L.A., Kurz, H. et al. Phenomenology of picosecond heating and evaporation of silicon surfaces coated with SiO2 layers. Appl. Phys. A 34, 25–29 (1984). https://doi.org/10.1007/BF00617570

Download citation

PACS

  • 64.70.Fx
  • 44
  • 79.20.Ds