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Accuracy of determining the optical constants of semiconductors from their infrared transmittance

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Abstract

The accuracy of determining the optical constants of semiconductors in the infrared range on the basis of absolute and relative transmittances of layers of varions thicknesses is analyzed graphically. The analysis showed that measurement of absolute transmittances for thickness ratios not smaller than three yields sufficiently accurate absorptance and reflectance values. Measurement of relative transmittances with allowance for multiple reflection is a highly accurate means of determining absorptance but is useless for determining reflectance. The curves appearing in the paper make possible practical error estimates for various specimen thickness ratios and surface reflectances.

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Borets, A.N., Gertovich, T.S. Accuracy of determining the optical constants of semiconductors from their infrared transmittance. J Appl Spectrosc 4, 384–386 (1966). https://doi.org/10.1007/BF00617418

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Keywords

  • Reflection
  • Analytical Chemistry
  • Molecular Structure
  • Error Estimate
  • Optical Constant