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Space-time resolved reflectivity measurements of picosecond laser-pulse induced phase transitions in (111) silicon surface layers

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Abstract

The changes in reflectivity of a silicon surface, irradiated by a green picosecond pulse, are probed during and following that pulse with a spatial resolution of 10 μm. The data indicate the development of a liquid phase, and a resolidification either into a single crystal or an amorphous phase. The latter has a characteristic ring-type pattern, and occurs only at locations where the incident picosecond laser fluence lies between 0.2 and 0.26 J/cm2. The reflectivity data appear to be in good quantitative agreement with a “simple heating” model, in which the electrons and phonons maintain a local thermodynamic equilibrium on a picosecond time scale.

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On leave from Philips Research Laboratories, D-2000 Hamburg 54, F. R. Germany

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Yen, R., Liu, J.M., Kurz, H. et al. Space-time resolved reflectivity measurements of picosecond laser-pulse induced phase transitions in (111) silicon surface layers. Appl. Phys. A 27, 153–160 (1982). https://doi.org/10.1007/BF00616666

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