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On the use of actinometric emission spectroscopy in SF6-O2 radiofrequency discharges: Theoretical and experimental analysis

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Abstract

A comparison of the results obtained by solving the Boltzmann equation with the experimental results from optical emissions obtained in SF6-O2 radiofrequency discharges, when N2, Ar, and He are also admitted as actinometers, has allowed us to explore the potentialities and limits of actinometry. The use of different actinometers also allowed us to monitor the evolution of the electron distribution functions as a function of the plasma parameters.

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d'Agostino, R., Cramarossa, F., De Benedictis, S. et al. On the use of actinometric emission spectroscopy in SF6-O2 radiofrequency discharges: Theoretical and experimental analysis. Plasma Chem Plasma Process 5, 239–253 (1985). https://doi.org/10.1007/BF00615123

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Key words

  • Actionometry
  • spectroscopy
  • etching
  • SF6-O2 discharge