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Sputtering techniques, especially secondary ion mass spectrometry

Zerstäubungs-Verfahren, insbesondere Sekundärionen-Massenspektrometrie

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References

  1. 1.

    Benninghoven A, Sichtermann W (1977) Org Mass Spectrom 12:595

  2. 2.

    Benninghoven A, Sichtermann W (1978) Anal Chem 50:1180

  3. 3.

    Benninghoven A, Niehuis E, Friese T, Greifendorf D, Steffens P, Org Mass Spectrom (in press)

  4. 4.

    Barber M, Bordoli RS, Sedwick RD, Tyler AN (1982) Anal Chem 54:645 A

  5. 5.

    Steffens P, Niehuis E, Friese T, Benninghoven A (1983) In: Benninghoven A (ed) Springer series in chemical physics, vol 25. Springer, Berlin Heidelberg New York Tokyo, p 111

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Benninghoven, A. Sputtering techniques, especially secondary ion mass spectrometry. Z. Anal. Chem. 317, 632–633 (1984). https://doi.org/10.1007/BF00593798

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Keywords

  • Physical Chemistry
  • Analytical Chemistry
  • Mass Spectrometry
  • Inorganic Chemistry