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Hydrogen profile analysis in a-C:H films by elastic recoil detection (ERD)

Wasserstoffprofilanalyse in a-C:H-Filmen durch elastische Rückstoß-Detektion (ERD)

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Summary

The measurement of hydrogen profiles in diamond-like carbon films (a-C∶H) by elastic recoil detection (ERD) and the decrease of the H content after irradiation with Ni ions are described.

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Author information

Correspondence to K. Schmidt.

Additional information

Guest scientist from IMR of Academia Sinica, Shenyang, People's Republic of China

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Schmidt, K., Reichelt, K., Stritzker, B. et al. Hydrogen profile analysis in a-C:H films by elastic recoil detection (ERD). Z. Anal. Chem. 333, 326–328 (1989). https://doi.org/10.1007/BF00572317

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Keywords

  • Hydrogen
  • Physical Chemistry
  • Analytical Chemistry
  • Inorganic Chemistry
  • Profile Analysis